Onto Innovation
Patents, Design & Utilities
Last updated:
List of all Onto Innovation patents 39 in total
| Status | Patent |
|---|---|
Application | Utility: NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND METHODS Filling date: 5 Sep 2025 Issue date: 21 Jul 2022 |
Grant | Utility: Interferometry with pixelated color discriminating elements combined with pixelated polarization masks Filling date: 5 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Conformal stage Filling date: 5 Sep 2025 Issue date: 7 Jun 2022 |
Application | Utility: FOCUS SYSTEM FOR OBLIQUE OPTICAL METROLOGY DEVICE Filling date: 5 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: VORTEX POLARIMETER Filling date: 5 Sep 2025 Issue date: 2 Jun 2022 |
Grant | Utility: Focus system for oblique optical metrology device Filling date: 5 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Vortex polarimeter Filling date: 5 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Fast generalized multi-wavelength ellipsometer Filling date: 5 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Active damper for semiconductor metrology and inspection systems Filling date: 5 Sep 2025 Issue date: 22 Mar 2022 |
Application | Utility: SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS Filling date: 5 Sep 2025 Issue date: 10 Mar 2022 |
Grant | Utility: On-axis dynamic interferometer and optical imaging systems employing the same Filling date: 5 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Optical metrology device using numerical aperture reduction Filling date: 5 Sep 2025 Issue date: 2 Nov 2021 |
Application | Utility: TARGET FOR OPTICAL MEASUREMENT OF TRENCHES Filling date: 5 Sep 2025 Issue date: 21 Oct 2021 |
Grant | Utility: Sample surface polarization modification in interferometric defect inspection Filling date: 5 Sep 2025 Issue date: 19 Oct 2021 |
Application | Utility: CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY Filling date: 5 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: ENHANCED HEAT TRANSFER IN LIQUEFIED GAS COOLED DETECTOR Filling date: 5 Sep 2025 Issue date: 7 Oct 2021 |
Grant | Utility: System and method for optimizing a lithography exposure process Filling date: 5 Sep 2025 Issue date: 21 Sep 2021 |
Application | Utility: SYSTEM AND METHOD FOR CORRECTING OVERLAY ERRORS IN A LITHOGRAPHIC PROCESS Filling date: 5 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: FAST GENERALIZED MULTI-WAVELENGTH ELLIPSOMETER Filling date: 5 Sep 2025 Issue date: 26 Aug 2021 |
Grant | Utility: Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance Filling date: 5 Sep 2025 Issue date: 3 Aug 2021 |
Application | Utility: BEAMSPLITTER BASED ELLIPSOMETER FOCUSING SYSTEM Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: SAMPLE SURFACE POLARIZATION MODIFICATION IN INTERFEROMETRIC DEFECT INSPECTION Filling date: 5 Sep 2025 Issue date: 25 Mar 2021 |
Grant | Utility: Sample inspection using topography Filling date: 5 Sep 2025 Issue date: 2 Mar 2021 |
Grant | Utility: Sub-resolution defect detection Filling date: 5 Sep 2025 Issue date: 2 Mar 2021 |
Grant | Utility: Non-adhesive mounting assembly for a tall Rochon polarizer Filling date: 5 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Optical metrology system using infrared wavelengths Filling date: 5 Sep 2025 Issue date: 26 Jan 2021 |
Application | Utility: CONFORMAL STAGE Filling date: 5 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: ACTIVE DAMPER FOR SEMICONDUCTOR METROLOGY AND INSPECTION SYSTEMS Filling date: 5 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: OPTICAL METROLOGY DEVICE USING NUMERICAL APERTURE REDUCTION Filling date: 5 Sep 2025 Issue date: 19 Nov 2020 |
Application | Utility: LASER TRIANGULATION SENSOR SYSTEM AND METHOD FOR WAFER INSPECTION Filling date: 5 Sep 2025 Issue date: 12 Nov 2020 |
Grant | Utility: Interferometer with pixelated phase shift mask Filling date: 5 Sep 2025 Issue date: 10 Nov 2020 |
Application | Utility: SEPARATED AXIS LITHOGRAPHIC TOOL Filling date: 5 Sep 2025 Issue date: 22 Oct 2020 |
Grant | Utility: FOUP purge shield Filling date: 5 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Light source failure identification in an optical metrology device Filling date: 5 Sep 2025 Issue date: 15 Sep 2020 |
Application | Utility: HIGH RESOLUTION STAGE POSITIONER Filling date: 5 Sep 2025 Issue date: 10 Sep 2020 |
Grant | Utility: Optical metrology device for measuring samples having thin or thick films Filling date: 5 Sep 2025 Issue date: 18 Aug 2020 |
Application | Utility: SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS Filling date: 5 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: OPTICAL METROLOGY DEVICE FOR MEASURING SAMPLES HAVING THIN OR THICK FILMS Filling date: 5 Sep 2025 Issue date: 11 Jun 2020 |
Grant | Utility: Correction of angular error of plane-of-incidence azimuth of optical metrology device Filling date: 5 Sep 2025 Issue date: 14 Apr 2020 |
Showing 1 to 39 of 39 patents.