Onto Innovation Inc.
On-axis dynamic interferometer and optical imaging systems employing the same

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Abstract:

An optical device for characterizing a workpiece combines an interferometer with a polarization rotation pellicle, installed in a stand-alone fashion in a spatial gap between the mirrors of the interferometer, and a polarization based phase-shift sensor.

Status:
Grant
Type:

Utility

Filling date:

11 Jul 2019

Issue date:

1 Mar 2022