Onto Innovation Inc.
On-axis dynamic interferometer and optical imaging systems employing the same
Last updated:
Abstract:
An optical device for characterizing a workpiece combines an interferometer with a polarization rotation pellicle, installed in a stand-alone fashion in a spatial gap between the mirrors of the interferometer, and a polarization based phase-shift sensor.
Status:
Grant
Type:
Utility
Filling date:
11 Jul 2019
Issue date:
1 Mar 2022