Onto Innovation Inc.
Conformal stage

Last updated:

Abstract:

An improved stage for the processing of large, thin substrates, such as glass and semiconductor panels. Processing includes lithography, inspection, metrology, grinding, and the like. The stage includes a chuck that moves over a base relative to a device for processing a substrate. The chuck conforms to a geometry of the base while moving relative to the base.

Status:
Grant
Type:

Utility

Filling date:

21 Dec 2018

Issue date:

7 Jun 2022