Onto Innovation Inc.
CONFORMAL STAGE
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Abstract:
An improved stage for the processing of large, thin substrates, such as glass and semiconductor panels. Processing includes lithography, inspection, metrology, grinding, and the like. The stage includes a chuck that moves over a base relative to a device for processing a substrate. The chuck conforms to a geometry of the base while moving relative to the base.
Status:
Application
Type:
Utility
Filling date:
21 Dec 2018
Issue date:
24 Dec 2020