PDF Solutions, Inc.
Abnormal Wafer Image Classification
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Abstract:
A semiconductor image classifier. Convolution functions are applied to modify the wafer images in order to extract key information about the image. The modified images are condensed then processed through a series of pairwise classifiers, each classifier configured to determine that the image is more like one of the pair than the other. Probabilities from each classifier are collected to form a prediction for each image.
Status:
Application
Type:
Utility
Filling date:
22 Apr 2021
Issue date:
28 Oct 2021