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Abnormal Wafer Image Classification

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Abstract:

A semiconductor image classifier. Convolution functions are applied to modify the wafer images in order to extract key information about the image. The modified images are condensed then processed through a series of pairwise classifiers, each classifier configured to determine that the image is more like one of the pair than the other. Probabilities from each classifier are collected to form a prediction for each image.

Status:
Application
Type:

Utility

Filling date:

22 Apr 2021

Issue date:

28 Oct 2021