PDF Solutions, Inc.
IC with test structures and e-beam pads embedded within a contiguous standard cell area
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Abstract:
An IC that includes a contiguous standard cell area with a 4x3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
Status:
Grant
Type:
Utility
Filling date:
30 Jun 2019
Issue date:
31 Aug 2021