PDF Solutions, Inc.
Anomalous Equipment Trace Detection and Classification

Abstract:

Scheme for detection and classification of semiconductor equipment faults. Sensor traces are monitored and processed to separate known abnormal operating conditions from unknown abnormal operating conditions. Feature engineering permits focus on relevant traces for a targeted feature. A machine learning model is built to detect and classify based on an initial classification set of anomalies. The machine learning model is continuously updated as more traces are processed and learned.