PDF Solutions, Inc.
IC with test structures and E-beam pads embedded within a contiguous standard cell area

Last updated:

Abstract:

An IC that includes a contiguous standard cell area with a 4.times.3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.

Status:
Grant
Type:

Utility

Filling date:

30 Jun 2019

Issue date:

27 Jul 2021