PDF Solutions, Inc.
IC with test structures and E-beam pads embedded within a contiguous standard cell area
Last updated:
Abstract:
An IC that includes a contiguous standard cell area with a 4.times.3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
Status:
Grant
Type:
Utility
Filling date:
30 Jun 2019
Issue date:
27 Jul 2021