Veeco Instruments Inc.
CHEMICAL VAPOR DEPOSITION WAFER CARRIERS
Last updated:
Abstract:
A wafer carrier has a plurality of built-up pockets connected by raised interstitial spaces on a base. Top cover plates are affixed to the base by fasteners and separated from direct thermal contact b302y spacers.
Status:
Application
Type:
Utility
Filling date:
21 Aug 2018
Issue date:
27 Feb 2020