Veeco Instruments
Patents, Design & Utilities
Last updated:
List of all Veeco Instruments patents 51 in total
| Status | Patent |
|---|---|
Grant | Utility: Melt detection systems and methods of using the same Filling date: 26 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: High-efficiency line-forming optical systems and methods using a serrated spatial filter Filling date: 26 Sep 2025 Issue date: 16 Aug 2022 |
Application | Utility: Rotating Disk Reactor with Split Substrate Carrier Filling date: 26 Sep 2025 Issue date: 4 Aug 2022 |
Grant | Utility: Semiconductor wafer processing chamber Filling date: 26 Sep 2025 Issue date: 24 May 2022 |
Application | Utility: Automated Batch Production Thin Film Deposition Systems and Methods of Using the Same Filling date: 26 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: Reactor with Centering Pin for Epitaxial Deposition Filling date: 26 Sep 2025 Issue date: 3 Mar 2022 |
Grant | Utility: Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems Filling date: 26 Sep 2025 Issue date: 15 Feb 2022 |
Grant | Utility: System and method for self-cleaning wet treatment process Filling date: 26 Sep 2025 Issue date: 25 Jan 2022 |
Application | Utility: ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL Filling date: 26 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL Filling date: 26 Sep 2025 Issue date: 23 Sep 2021 |
Grant | Utility: Apparatus and method for the minimization of undercut during a UBM etch process Filling date: 26 Sep 2025 Issue date: 20 Jul 2021 |
Application | Utility: APPARATUS AND METHOD FOR DIE STACK FLUX REMOVAL Filling date: 26 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION Filling date: 26 Sep 2025 Issue date: 10 Jun 2021 |
Grant | Design: Multi-filament heater assembly Filling date: 26 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Apparatus and method for the minimization of undercut during a UBM etch process Filling date: 26 Sep 2025 Issue date: 11 May 2021 |
Application | Utility: MOLECULAR BEAM EPITAXY SYSTEMS WITH VARIABLE SUBSTRATE-TO-SOURCE ARRANGEMENTS Filling date: 26 Sep 2025 Issue date: 22 Apr 2021 |
Grant | Utility: Micro-LED transfer methods using light-based debonding Filling date: 26 Sep 2025 Issue date: 20 Apr 2021 |
Application | Utility: CVD Reactor Single Substrate Carrier and Rotating Tube for Stable Rotation Filling date: 26 Sep 2025 Issue date: 1 Apr 2021 |
Grant | Design: Transportable semiconductor wafer rack Filling date: 26 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Design: Transportable semiconductor wafer rack Filling date: 26 Sep 2025 Issue date: 19 Jan 2021 |
Application | Utility: Melt Detection Systems and Methods of Using the Same Filling date: 26 Sep 2025 Issue date: 14 Jan 2021 |
Grant | Utility: Laser annealing systems and methods with ultra-short dwell times Filling date: 26 Sep 2025 Issue date: 24 Nov 2020 |
Grant | Utility: Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD Filling date: 26 Sep 2025 Issue date: 24 Nov 2020 |
Application | Utility: DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES Filling date: 26 Sep 2025 Issue date: 12 Nov 2020 |
Grant | Design: Mid-filament spacer Filling date: 26 Sep 2025 Issue date: 11 Aug 2020 |
Application | Utility: Rotating Disk Reactor with Self-Locking Carrier-to-Support Interface for Chemical Vapor Deposition Filling date: 26 Sep 2025 Issue date: 6 Aug 2020 |
Grant | Utility: Rotating disk reactor with ferrofluid seal for chemical vapor deposition Filling date: 26 Sep 2025 Issue date: 21 Jul 2020 |
Grant | Utility: Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle Filling date: 26 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Laser-assisted atomic layer deposition of 2D metal chalcogenide films Filling date: 26 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing Filling date: 26 Sep 2025 Issue date: 26 May 2020 |
Application | Utility: SEMICONDUCTOR WAFER PROCESSING CHAMBER Filling date: 26 Sep 2025 Issue date: 21 May 2020 |
Application | Utility: SYSTEM AND METHOD FOR METROLOGY USING MULTIPLE MEASUREMENT TECHNIQUES Filling date: 26 Sep 2025 Issue date: 12 Mar 2020 |
Application | Utility: CHEMICAL VAPOR DEPOSITION WAFER CARRIERS Filling date: 26 Sep 2025 Issue date: 27 Feb 2020 |
Grant | Utility: Gas concentration sensors and systems Filling date: 26 Sep 2025 Issue date: 25 Feb 2020 |
Grant | Utility: Periphery purge shutter and flow control systems and methods Filling date: 26 Sep 2025 Issue date: 25 Feb 2020 |
Application | Utility: Chemical vapor deposition wafer carriers Filling date: 26 Sep 2025 Issue date: 20 Feb 2020 |
Application | Utility: Micro-LED Transfer Methods Using Light-Based Debonding Filling date: 26 Sep 2025 Issue date: 26 Dec 2019 |
Grant | Utility: Filter element for wafer processing assembly Filling date: 26 Sep 2025 Issue date: 24 Dec 2019 |
Application | Utility: Self-Centering Wafer Carrier System for Chemical Vapor Deposition Filling date: 26 Sep 2025 Issue date: 28 Nov 2019 |
Grant | Design: Chemical vapor deposition wafer carrier with thermal cover Filling date: 26 Sep 2025 Issue date: 12 Nov 2019 |
Application | Utility: CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK Filling date: 26 Sep 2025 Issue date: 17 Oct 2019 |
Grant | Design: Chemical vapor deposition wafer carrier with thermal cover Filling date: 26 Sep 2025 Issue date: 15 Oct 2019 |
Grant | Utility: Self-centering wafer carrier system for chemical vapor deposition Filling date: 26 Sep 2025 Issue date: 8 Oct 2019 |
Application | Utility: WAFER PROCESSING SYSTEM WITH FLOW EXTENDER Filling date: 26 Sep 2025 Issue date: 3 Oct 2019 |
Application | Utility: CHEMICAL VAPOR DEPOSITION WAFER CARRIER WITH THERMAL COVER Filling date: 26 Sep 2025 Issue date: 26 Sep 2019 |
Grant | Design: Chemical vapor deposition wafer carrier with thermal cover Filling date: 26 Sep 2025 Issue date: 17 Sep 2019 |
Grant | Design: Wafer carrier with a 33-pocket configuration Filling date: 26 Sep 2025 Issue date: 17 Sep 2019 |
Grant | Design: Chemical vapor deposition wafer carrier with thermal cover Filling date: 26 Sep 2025 Issue date: 3 Sep 2019 |
Application | Utility: PLASMA BRIDGE NEUTRALIZER FOR ION BEAM ETCHING Filling date: 26 Sep 2025 Issue date: 22 Aug 2019 |
Grant | Utility: Ion beam etching Filling date: 26 Sep 2025 Issue date: 13 Aug 2019 |
Showing 1 to 50 of 51 patents.