| Utility: Hydrogen generator for an ion implanter Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 | 20 Nov 2020 | 15 Mar 2022 |
| Utility: Stepped indirectly heated cathode with improved shielding Filling date: 6 Sep 2025 Issue date: 8 Feb 2022 | 26 May 2021 | 8 Feb 2022 |
| Utility: Multiple arc chamber source Filling date: 6 Sep 2025 Issue date: 23 Nov 2021 | 16 Apr 2020 | 23 Nov 2021 |
| Utility: Liquid metal ion source Filling date: 6 Sep 2025 Issue date: 9 Nov 2021 | 19 Mar 2020 | 9 Nov 2021 |
| Utility: Substrate support having customizable and replaceable features for enhanced backside contamination performance Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 | 23 Aug 2019 | 7 Sep 2021 |
| Utility: Scanning magnet design with enhanced efficiency Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 | 21 Aug 2018 | 7 Sep 2021 |
| Utility: Hydrogen bleed gas for an ion source housing Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 10 May 2019 | 13 Jul 2021 |
| Utility: Scan and corrector magnet designs for high throughput scanned beam ion implanter Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 19 Dec 2019 | 15 Jun 2021 |
| Utility: Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 20 Dec 2018 | 18 May 2021 |
| Utility: In-situ wafer temperature measurement and control Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 | 28 Mar 2019 | 26 Jan 2021 |
| Utility: Radiant heating presoak Filling date: 6 Sep 2025 Issue date: 8 Dec 2020 | 16 Jan 2018 | 8 Dec 2020 |
| Utility: Hydrogen generator for an ion implanter Filling date: 6 Sep 2025 Issue date: 24 Nov 2020 | 21 Jan 2019 | 24 Nov 2020 |
| Utility: High throughput serial wafer handling end station Filling date: 6 Sep 2025 Issue date: 10 Nov 2020 | 27 Dec 2016 | 10 Nov 2020 |
| Utility: Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment Filling date: 6 Sep 2025 Issue date: 6 Oct 2020 | 25 Oct 2018 | 6 Oct 2020 |
| Utility: Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 | 20 Jun 2017 | 15 Sep 2020 |
| Utility: System and method for aligning light-transmitting birefringent workpieces Filling date: 6 Sep 2025 Issue date: 21 Jul 2020 | 28 Aug 2018 | 21 Jul 2020 |
| Utility: Reduction of condensed gases on chamber walls via heated chamber housing for semiconductor processing equipment Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 4 Jan 2019 | 14 Jul 2020 |
| Utility: Ion source with tailored extraction shape Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 12 Dec 2018 | 14 Jul 2020 |
| Utility: Film stabilization through novel materials modification of beamline components Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 16 Nov 2018 | 23 Jun 2020 |
| Utility: Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 5 Dec 2017 | 23 Jun 2020 |
| Utility: Low conductance self-shielding insulator for ion implantation systems Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 10 Aug 2018 | 9 Jun 2020 |
| Utility: Hydrogen co-gas when using aluminum iodide as an ion source material Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 1 Jun 2018 | 9 Jun 2020 |
| Utility: System and method for in-situ beamline film stabilization or removal in the AEF region Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 5 Oct 2018 | 3 Mar 2020 |
| Utility: Tetrode extraction apparatus for ion source Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 20 Dec 2018 | 25 Feb 2020 |
| Utility: System for semiconductor wafer retention and sensing in a vacuum load lock Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 28 Nov 2016 | 25 Feb 2020 |
| Utility: Scan and corrector magnet designs for high throughput scanned beam ion implanter Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 | 13 Dec 2018 | 4 Feb 2020 |
| Utility: Lanthanated tungsten ion source and beamline components Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 | 14 Aug 2018 | 14 Jan 2020 |
| Utility: System and method of arc detection using dynamic threshold Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 | 19 Dec 2018 | 24 Dec 2019 |
| Utility: Beam profiling speed enhancement for scanned beam implanters Filling date: 6 Sep 2025 Issue date: 19 Nov 2019 | 22 Dec 2015 | 19 Nov 2019 |
| Utility: Wafer cooling system and method Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 12 Apr 2018 | 3 Sep 2019 |
| Utility: Two-axis variable width mass resolving aperture with fast acting shutter motion Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 1 Mar 2018 | 27 Aug 2019 |
| Utility: In situ beam current monitoring and control in scanned ion implantation systems Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 7 Sep 2016 | 27 Aug 2019 |
