Axcelis Technologies
Patents, Design & Utilities

Last updated:

List of all Axcelis Technologies patents 60 in total

Status Patent
Application
Utility: HYBRID HIGH-TEMPERATURE ELECTROSTATIC CLAMP FOR IMPROVED WORKPIECE TEMPERATURE UNIFORMITY External link
Filling date: 5 Sep 2025 Issue date: 12 May 2022
Application
Utility: ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM ION BEAM External link
Filling date: 5 Sep 2025 Issue date: 5 May 2022
Grant
Utility: Hydrogen generator for an ion implanter External link
Filling date: 5 Sep 2025 Issue date: 15 Mar 2022
Grant
Utility: Stepped indirectly heated cathode with improved shielding External link
Filling date: 5 Sep 2025 Issue date: 8 Feb 2022
Application
Utility: HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL External link
Filling date: 5 Sep 2025 Issue date: 13 Jan 2022
Application
Utility: TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM External link
Filling date: 5 Sep 2025 Issue date: 23 Dec 2021
Application
Utility: STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING External link
Filling date: 5 Sep 2025 Issue date: 23 Dec 2021
Application
Utility: ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM External link
Filling date: 5 Sep 2025 Issue date: 25 Nov 2021
Grant
Utility: Multiple arc chamber source External link
Filling date: 5 Sep 2025 Issue date: 23 Nov 2021
Grant
Utility: Liquid metal ion source External link
Filling date: 5 Sep 2025 Issue date: 9 Nov 2021
Grant
Utility: Substrate support having customizable and replaceable features for enhanced backside contamination performance External link
Filling date: 5 Sep 2025 Issue date: 7 Sep 2021
Grant
Utility: Scanning magnet design with enhanced efficiency External link
Filling date: 5 Sep 2025 Issue date: 7 Sep 2021
Application
Utility: APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPLANTATION SYSTEM USING CHARGE STRIPPING MECHANISM External link
Filling date: 5 Sep 2025 Issue date: 12 Aug 2021
Grant
Utility: Hydrogen bleed gas for an ion source housing External link
Filling date: 5 Sep 2025 Issue date: 13 Jul 2021
Grant
Utility: Scan and corrector magnet designs for high throughput scanned beam ion implanter External link
Filling date: 5 Sep 2025 Issue date: 15 Jun 2021
Grant
Utility: Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment External link
Filling date: 5 Sep 2025 Issue date: 18 May 2021
Application
Utility: HYDROGEN GENERATOR FOR AN ION IMPLANTER External link
Filling date: 5 Sep 2025 Issue date: 25 Mar 2021
Application
Utility: METHOD OF ENHANCING THE ENERGY AND BEAM CURRENT ON RF BASED IMPLANTER External link
Filling date: 5 Sep 2025 Issue date: 25 Feb 2021
Grant
Utility: In-situ wafer temperature measurement and control External link
Filling date: 5 Sep 2025 Issue date: 26 Jan 2021
Application
Utility: TOXIC OUTGAS CONTROL POST PROCESS External link
Filling date: 5 Sep 2025 Issue date: 14 Jan 2021
Application
Utility: SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOLECULAR CARBON IMPLANTS External link
Filling date: 5 Sep 2025 Issue date: 10 Dec 2020
Grant
Utility: Radiant heating presoak External link
Filling date: 5 Sep 2025 Issue date: 8 Dec 2020
Application
Utility: CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS External link
Filling date: 5 Sep 2025 Issue date: 3 Dec 2020
Grant
Utility: Hydrogen generator for an ion implanter External link
Filling date: 5 Sep 2025 Issue date: 24 Nov 2020
Grant
Utility: High throughput serial wafer handling end station External link
Filling date: 5 Sep 2025 Issue date: 10 Nov 2020
Application
Utility: HIGH POWER WAFER COOLING External link
Filling date: 5 Sep 2025 Issue date: 5 Nov 2020
Application
Utility: MULTIPLE ARC CHAMBER SOURCE External link
Filling date: 5 Sep 2025 Issue date: 22 Oct 2020
Grant
Utility: Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment External link
Filling date: 5 Sep 2025 Issue date: 6 Oct 2020
Application
Utility: LIQUID METAL ION SOURCE External link
Filling date: 5 Sep 2025 Issue date: 24 Sep 2020
Grant
Utility: Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products External link
Filling date: 5 Sep 2025 Issue date: 15 Sep 2020
Application
Utility: METHOD OF MIXING UPSTREAM AND DOWNSTREAM CURRENT MEASUREMENTS FOR INFERENCE OF THE BEAM CURRENT AT THE BEND OF AN OPTICAL ELEMENT FOR REALTIME DOSE CONTROL External link
Filling date: 5 Sep 2025 Issue date: 20 Aug 2020
Grant
Utility: System and method for aligning light-transmitting birefringent workpieces External link
Filling date: 5 Sep 2025 Issue date: 21 Jul 2020
Grant
Utility: Reduction of condensed gases on chamber walls via heated chamber housing for semiconductor processing equipment External link
Filling date: 5 Sep 2025 Issue date: 14 Jul 2020
Grant
Utility: Ion source with tailored extraction shape External link
Filling date: 5 Sep 2025 Issue date: 14 Jul 2020
Application
Utility: REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA HEATED CHAMBER HOUSING FOR SEMICONDUCTOR PROCESSING EQUIPMENT External link
Filling date: 5 Sep 2025 Issue date: 9 Jul 2020
Application
Utility: REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA PURGE GAS DILUTION AND EVACUATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT External link
Filling date: 5 Sep 2025 Issue date: 9 Jul 2020
Application
Utility: METHOD FOR DECREASING COOL DOWN TIME WITH HEATED SYSTEM FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT External link
Filling date: 5 Sep 2025 Issue date: 25 Jun 2020
Application
Utility: WAFER SOAK TEMPERATURE READBACK AND CONTROL VIA THERMOCOUPLE EMBEDDED END EFFECTOR FOR SEMICONDUCTOR PROCESSING EQUIPMENT External link
Filling date: 5 Sep 2025 Issue date: 25 Jun 2020
Grant
Utility: Film stabilization through novel materials modification of beamline components External link
Filling date: 5 Sep 2025 Issue date: 23 Jun 2020
Grant
Utility: Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck External link
Filling date: 5 Sep 2025 Issue date: 23 Jun 2020
Application
Utility: SCAN AND CORRECTOR MAGNET DESIGNS FOR HIGH THROUGHPUT SCANNED BEAM ION IMPLANTER External link
Filling date: 5 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: ION SOURCE WITH TAILORED EXTRACTION APERTURE SHAPE External link
Filling date: 5 Sep 2025 Issue date: 18 Jun 2020
Grant
Utility: Low conductance self-shielding insulator for ion implantation systems External link
Filling date: 5 Sep 2025 Issue date: 9 Jun 2020
Grant
Utility: Hydrogen co-gas when using aluminum iodide as an ion source material External link
Filling date: 5 Sep 2025 Issue date: 9 Jun 2020
Application
Utility: SYSTEM AND METHOD FOR ALIGNING LIGHT-TRANSMITTING BIREFRINGENT WORKPIECES External link
Filling date: 5 Sep 2025 Issue date: 5 Mar 2020
Grant
Utility: System and method for in-situ beamline film stabilization or removal in the AEF region External link
Filling date: 5 Sep 2025 Issue date: 3 Mar 2020
Application
Utility: SUBSTRATE SUPPORT HAVING CUSTOMIZABLE AND REPLACEABLE FEATURES FOR ENHANCED BACKSIDE CONTAMINATION PERFORMANCE External link
Filling date: 5 Sep 2025 Issue date: 27 Feb 2020
Application
Utility: SCANNING MAGNET DESIGN WITH ENHANCED EFFICIENCY External link
Filling date: 5 Sep 2025 Issue date: 27 Feb 2020
Grant
Utility: Tetrode extraction apparatus for ion source External link
Filling date: 5 Sep 2025 Issue date: 25 Feb 2020
Grant
Utility: System for semiconductor wafer retention and sensing in a vacuum load lock External link
Filling date: 5 Sep 2025 Issue date: 25 Feb 2020

Showing 1 to 50 of 60 patents.