Advanced Energy Industries
Utility Patents

Last updated:

List of all Advanced Energy Industries patents 40 in total

Status Patent
Grant
Utility: Inter-period control system for plasma power delivery system and method of operating same External link
Filling date: 7 Sep 2025 Issue date: 20 Sep 2022
Grant
Utility: Spatial monitoring and control of plasma processing environments External link
Filling date: 7 Sep 2025 Issue date: 6 Sep 2022
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Utility: System and apparatus with low power pin diode drivers External link
Filling date: 7 Sep 2025 Issue date: 28 Jun 2022
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Utility: Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions External link
Filling date: 7 Sep 2025 Issue date: 21 Jun 2022
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Utility: High side current monitor External link
Filling date: 7 Sep 2025 Issue date: 22 Mar 2022
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Utility: Spatial monitoring and control of plasma processing environments External link
Filling date: 7 Sep 2025 Issue date: 22 Mar 2022
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Utility: Application of modulating supplies in a plasma processing system External link
Filling date: 7 Sep 2025 Issue date: 1 Mar 2022
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Utility: Multiplexed power generator output with channel offsets for pulsed driving of multiple loads External link
Filling date: 7 Sep 2025 Issue date: 1 Feb 2022
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Utility: Triboelectric-based cable sensors External link
Filling date: 7 Sep 2025 Issue date: 14 Dec 2021
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Utility: Control circuit for a power converter External link
Filling date: 7 Sep 2025 Issue date: 30 Nov 2021
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Utility: Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system External link
Filling date: 7 Sep 2025 Issue date: 30 Nov 2021
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Utility: Combination air-water cooling device External link
Filling date: 7 Sep 2025 Issue date: 16 Nov 2021
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Utility: Method and apparatus for changing the apparent source impedance of a generator External link
Filling date: 7 Sep 2025 Issue date: 5 Oct 2021
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Utility: System and method to measure and adjust a charge of a workpiece External link
Filling date: 7 Sep 2025 Issue date: 27 Jul 2021
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Utility: Rate enhanced pulsed DC sputtering system External link
Filling date: 7 Sep 2025 Issue date: 29 Jun 2021
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Utility: High energy pulse on a high-voltage-direct-current offset External link
Filling date: 7 Sep 2025 Issue date: 18 May 2021
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Utility: System, method, and apparatus for controlling ion energy distribution in plasma processing systems External link
Filling date: 7 Sep 2025 Issue date: 18 May 2021
Grant
Utility: Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions External link
Filling date: 7 Sep 2025 Issue date: 9 Mar 2021
Grant
Utility: Detection of damage in matching networks External link
Filling date: 7 Sep 2025 Issue date: 9 Mar 2021
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Utility: Rate enhanced pulsed DC sputtering system External link
Filling date: 7 Sep 2025 Issue date: 2 Feb 2021
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Utility: Low power pin diode driver External link
Filling date: 7 Sep 2025 Issue date: 26 Jan 2021
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Utility: Synchronization between an excitation source and a substrate bias supply External link
Filling date: 7 Sep 2025 Issue date: 19 Jan 2021
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Utility: Adaptive plasma ignition External link
Filling date: 7 Sep 2025 Issue date: 5 Jan 2021
Grant
Utility: Inter-period control system for plasma power delivery system and method of operating the same External link
Filling date: 7 Sep 2025 Issue date: 8 Dec 2020
Grant
Utility: System and method for control of high efficiency generator source impedance External link
Filling date: 7 Sep 2025 Issue date: 17 Nov 2020
Grant
Utility: Synchronization with a bias supply in a plasma processing system External link
Filling date: 7 Sep 2025 Issue date: 20 Oct 2020
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Utility: Control of plasma processing systems that include plasma modulating supplies External link
Filling date: 7 Sep 2025 Issue date: 20 Oct 2020
Grant
Utility: Application of modulating supplies in a plasma processing system External link
Filling date: 7 Sep 2025 Issue date: 20 Oct 2020
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Utility: Power supply system with actively switched bus capacitor External link
Filling date: 7 Sep 2025 Issue date: 6 Oct 2020
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Utility: System and method for prolonging the life of switching components External link
Filling date: 7 Sep 2025 Issue date: 11 Aug 2020
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Utility: Pin diode driver with energy recovery External link
Filling date: 7 Sep 2025 Issue date: 11 Aug 2020
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Utility: Plasma delivery system for modulated plasma systems External link
Filling date: 7 Sep 2025 Issue date: 21 Jul 2020
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Utility: Spatial and temporal control of ion bias voltage for plasma processing External link
Filling date: 7 Sep 2025 Issue date: 7 Jul 2020
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Utility: Additive synthesis of interleaved switch mode power stages for minimal delay in set point tracking External link
Filling date: 7 Sep 2025 Issue date: 19 May 2020
Grant
Utility: Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions External link
Filling date: 7 Sep 2025 Issue date: 14 Apr 2020
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Utility: Variable capacitor bank External link
Filling date: 7 Sep 2025 Issue date: 14 Apr 2020
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Utility: Synchronized pulsing of plasma processing source and substrate bias External link
Filling date: 7 Sep 2025 Issue date: 31 Mar 2020
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Utility: System and method for plasma ignition External link
Filling date: 7 Sep 2025 Issue date: 12 Nov 2019
Grant
Utility: Additive synthesis of interleaved switch mode power stages for minimal delay in set point tracking External link
Filling date: 7 Sep 2025 Issue date: 15 Oct 2019
Grant
Utility: Systems and methods for single magnetron sputtering External link
Filling date: 7 Sep 2025 Issue date: 6 Aug 2019

Showing 1 to 40 of 40 patents.