Applied Materials
Utility Patents

Last updated:

List of all Applied Materials patents 1,752 in total

Status Patent
Grant
Utility: Methods for depositing dielectric material External link
Filling date: 6 Sep 2025 Issue date: 7 Sep 2021
Grant
Utility: ESC substrate support with chucking force control External link
Filling date: 6 Sep 2025 Issue date: 7 Sep 2021
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Utility: Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity External link
Filling date: 6 Sep 2025 Issue date: 7 Sep 2021
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Utility: Plasma reactor with electrode array in ceiling External link
Filling date: 6 Sep 2025 Issue date: 7 Sep 2021
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Utility: Apparatus for exhaust cooling External link
Filling date: 6 Sep 2025 Issue date: 7 Sep 2021
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Utility: Non-disappearing anode for use with dielectric deposition External link
Filling date: 6 Sep 2025 Issue date: 7 Sep 2021
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Utility: Modular LED heater External link
Filling date: 6 Sep 2025 Issue date: 31 Aug 2021
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Utility: Methods for depositing silicon nitride External link
Filling date: 6 Sep 2025 Issue date: 31 Aug 2021
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Utility: Gas input system for a substrate processing chamber External link
Filling date: 6 Sep 2025 Issue date: 31 Aug 2021
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Utility: Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods External link
Filling date: 6 Sep 2025 Issue date: 31 Aug 2021
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Utility: Ring removal from processing chamber External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Methods for gapfill in substrates External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Gap fill deposition process External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Ion-ion plasma atomic layer etch process External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Multi-station chamber lid with precise temperature and flow control External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Methods and apparatus for co-sputtering multiple targets External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Process window widening using coated parts in plasma etch processes External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Thickness measurement of substrate using color metrology External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Thin film transistor with small storage capacitor with metal oxide switch External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Method for improving semiconductor back-end factories External link
Filling date: 6 Sep 2025 Issue date: 24 Aug 2021
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Utility: Construction of three-dimensional profiles of high aspect ratio structures using top down imaging External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Resonator coil having an asymmetrical profile External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Cure method for cross-linking Si-hydroxyl bonds External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Doped and undoped vanadium oxides for low-k spacer applications External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Interconnection structure of selective deposition process External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Methods of forming self-aligned vias External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: In-situ curing of color conversion layer External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Side inject nozzle design for processing chamber External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Multicolor self-aligned contact selective etch External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Film stress control for plasma enhanced chemical vapor deposition External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Method and apparatus for thin wafer carrier External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Processing chamber with substrate edge enhancement processing External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Method of reclaiming a seal External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Apparatus and methods for wafer chucking on a susceptor for ALD External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Additive manufacturing with powder dispensing External link
Filling date: 6 Sep 2025 Issue date: 17 Aug 2021
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Utility: Cryogenic atomic layer etch with noble gases External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Wafer based corrosion and time dependent chemical effects External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Device to increase deposition uniformity in spatial ALD processing chamber External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Methods and apparatus for producing copper-indium-gallium-selenium (CIGS) film External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Electrostatic chuck having thermally isolated zones with minimal crosstalk External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Cleaning method External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Data management and mining to correlate wafer alignment, design, defect, process, tool, and metrology data External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Additive manufacturing with cell processing recipes External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Correction of fabricated shapes in additive manufacturing using modified edge External link
Filling date: 6 Sep 2025 Issue date: 10 Aug 2021
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Utility: Argon addition to remote plasma oxidation External link
Filling date: 6 Sep 2025 Issue date: 3 Aug 2021
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Utility: Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices External link
Filling date: 6 Sep 2025 Issue date: 3 Aug 2021
Grant
Utility: Pumping apparatus and method for substrate processing chambers External link
Filling date: 6 Sep 2025 Issue date: 3 Aug 2021
Grant
Utility: Load port operation in electronic device manufacturing apparatus, systems, and methods External link
Filling date: 6 Sep 2025 Issue date: 3 Aug 2021

Showing 700 to 750 of 1752 patents.