Applied Materials
Utility Patents
Last updated:
List of all Applied Materials patents 1,752 in total
Status | Patent |
---|---|
Grant | Utility: Methods for depositing dielectric material Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: ESC substrate support with chucking force control Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Plasma reactor with electrode array in ceiling Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Apparatus for exhaust cooling Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Non-disappearing anode for use with dielectric deposition Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Modular LED heater Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Methods for depositing silicon nitride Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Gas input system for a substrate processing chamber Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Ring removal from processing chamber Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Methods for gapfill in substrates Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Gap fill deposition process Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Ion-ion plasma atomic layer etch process Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Multi-station chamber lid with precise temperature and flow control Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Methods and apparatus for co-sputtering multiple targets Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Process window widening using coated parts in plasma etch processes Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Thickness measurement of substrate using color metrology Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Thin film transistor with small storage capacitor with metal oxide switch Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Method for improving semiconductor back-end factories Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Construction of three-dimensional profiles of high aspect ratio structures using top down imaging Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Resonator coil having an asymmetrical profile Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Cure method for cross-linking Si-hydroxyl bonds Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Doped and undoped vanadium oxides for low-k spacer applications Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Interconnection structure of selective deposition process Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Methods of forming self-aligned vias Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: In-situ curing of color conversion layer Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Side inject nozzle design for processing chamber Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Multicolor self-aligned contact selective etch Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Film stress control for plasma enhanced chemical vapor deposition Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Method and apparatus for thin wafer carrier Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Processing chamber with substrate edge enhancement processing Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Method of reclaiming a seal Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Apparatus and methods for wafer chucking on a susceptor for ALD Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Additive manufacturing with powder dispensing Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Cryogenic atomic layer etch with noble gases Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Wafer based corrosion and time dependent chemical effects Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Device to increase deposition uniformity in spatial ALD processing chamber Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Methods and apparatus for producing copper-indium-gallium-selenium (CIGS) film Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Electrostatic chuck having thermally isolated zones with minimal crosstalk Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Cleaning method Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Data management and mining to correlate wafer alignment, design, defect, process, tool, and metrology data Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Additive manufacturing with cell processing recipes Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Correction of fabricated shapes in additive manufacturing using modified edge Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Argon addition to remote plasma oxidation Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Pumping apparatus and method for substrate processing chambers Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Load port operation in electronic device manufacturing apparatus, systems, and methods Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Showing 700 to 750 of 1752 patents.