| Utility: Silicide films through selective deposition Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 31 Mar 2020 | 16 Mar 2021 |
| Utility: Thermal processing chamber with low temperature control Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 14 Jan 2020 | 16 Mar 2021 |
| Utility: Electronic device manufacturing load port apparatus, systems, and methods Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 11 Oct 2019 | 16 Mar 2021 |
| Utility: Selective and self-limiting tungsten etch process Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 26 Sep 2019 | 16 Mar 2021 |
| Utility: Method and apparatus for processing a substrate using non-contact temperature measurement Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 20 Aug 2019 | 16 Mar 2021 |
| Utility: Pulsed plasma deposition etch step coverage improvement Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 18 Jun 2019 | 16 Mar 2021 |
| Utility: Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 26 Apr 2019 | 16 Mar 2021 |
| Utility: Film quality control in a linear scan physical vapor deposition process Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 5 Apr 2019 | 16 Mar 2021 |
| Utility: Methods for enhancing selectivity in SAM-based selective deposition Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 16 Nov 2018 | 16 Mar 2021 |
| Utility: Low vapor pressure chemical delivery Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 10 Sep 2018 | 16 Mar 2021 |
| Utility: Method and apparatus for selective nitridation process Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 13 Aug 2018 | 16 Mar 2021 |
| Utility: Methods and apparatus for filling a feature disposed in a substrate Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 4 May 2018 | 16 Mar 2021 |
| Utility: Methods and apparatus for creating a large area imprint without a seam Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 19 Mar 2018 | 16 Mar 2021 |
| Utility: Chemical mechanical polishing retaining ring with integrated sensor Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 28 Dec 2017 | 16 Mar 2021 |
| Utility: Display of spectra contour plots versus time for semiconductor processing system control Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 20 Dec 2017 | 16 Mar 2021 |
| Utility: Ceramic heater and esc with enhanced wafer edge performance Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 18 Jul 2016 | 16 Mar 2021 |
| Utility: SIDE INJECT DESIGNS FOR IMPROVED RADICAL CONCENTRATIONS Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 23 Nov 2020 | 11 Mar 2021 |
| Utility: METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPOR DEPOSITION PROCESSES Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 23 Nov 2020 | 11 Mar 2021 |
| Utility: Printing a Chemical Mechanical Polishing Pad Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 23 Nov 2020 | 11 Mar 2021 |
| Utility: Thermally Isolated Repeller And Electrodes Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 23 Oct 2020 | 11 Mar 2021 |
| Utility: Common Electrostatic Chuck For Differing Substrates Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 4 Sep 2020 | 11 Mar 2021 |
| Utility: VAPOR DELIVERY METHODS AND APPARATUS Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 4 Sep 2020 | 11 Mar 2021 |
| Utility: Shutter Disk Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 3 Sep 2020 | 11 Mar 2021 |
| Utility: METHODS FOR FORMING A PROTECTIVE COATING ON PROCESSING CHAMBER SURFACES OR COMPONENTS Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 27 Nov 2019 | 11 Mar 2021 |
| Utility: Additive Manufacturing of Polishing Pads Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 12 Nov 2019 | 11 Mar 2021 |
| Utility: Compositions and Methods of Additive Manufacturing of Polishing Pads Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 12 Nov 2019 | 11 Mar 2021 |
| Utility: METHODS FOR FORMING PROTECTIVE COATINGS CONTAINING CRYSTALLIZED ALUMINUM OXIDE Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 31 Oct 2019 | 11 Mar 2021 |
| Utility: APPARATUS AND TECHNIQUES FOR ION ENERGY MEASUREMENT IN PULSED ION BEAMS Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 10 Sep 2019 | 11 Mar 2021 |
| Utility: DYNAMIC PRESSURE CONTROL FOR PROCESSING CHAMBERS IMPLEMENTING REAL-TIME LEARNING Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 6 Sep 2019 | 11 Mar 2021 |
| Utility: INTERCONNECTION STRUCTURE OF SELECTIVE DEPOSITION PROCESS Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 5 Sep 2019 | 11 Mar 2021 |
| Utility: METHODS AND APPARATUS FOR DYNAMICAL CONTROL OF RADIAL UNIFORMITY WITH TWO-STORY MICROWAVE CAVITIES Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 | 5 Sep 2019 | 11 Mar 2021 |
| Utility: Digital sampling to control resonator frequency and phase in a LINAC Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 9 Jan 2020 | 9 Mar 2021 |
| Utility: Abatement and strip process chamber in a load lock configuration Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 18 Oct 2019 | 9 Mar 2021 |
| Utility: Use of electron beam scanning electron microscopy for characterization of a sidewall occluded from line-of-sight of the electron beam Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 24 Sep 2019 | 9 Mar 2021 |
| Utility: Magnetic tunnel junction structures and methods of manufacture thereof Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 13 Mar 2019 | 9 Mar 2021 |
| Utility: Methods and assemblies for gas flow ratio control Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 5 Mar 2019 | 9 Mar 2021 |
| Utility: Eco-efficiency characterization tool Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 18 Jan 2019 | 9 Mar 2021 |
| Utility: Methods for ALD of metal oxides on metal surfaces Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 19 Nov 2018 | 9 Mar 2021 |
| Utility: Ex-situ solid electrolyte interface modification using chalcogenides for lithium metal anode Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 2 Oct 2018 | 9 Mar 2021 |
| Utility: Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 18 May 2018 | 9 Mar 2021 |
| Utility: Multi-light beam energy delivery with rotating polygon for additive manufacturing Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 23 Apr 2018 | 9 Mar 2021 |
| Utility: Modular high-frequency source with integrated gas distribution Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 20 Apr 2018 | 9 Mar 2021 |
| Utility: Replacement contact process Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 12 Mar 2018 | 9 Mar 2021 |
| Utility: Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 13 Oct 2017 | 9 Mar 2021 |
| Utility: Ceramic electrostatic chuck having a V-shape seal band Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 25 Nov 2016 | 9 Mar 2021 |
| Utility: Method and system for three-dimensional (3D) structure fill Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 18 Nov 2016 | 9 Mar 2021 |
| Utility: Methods and apparatus for a microwave batch curing process Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 26 May 2016 | 9 Mar 2021 |
| Utility: METHODS AND APPARATUS FOR SMOOTHING DYNAMIC RANDOM ACCESS MEMORY BIT LINE METAL Filling date: 6 Sep 2025 Issue date: 4 Mar 2021 | 12 Nov 2020 | 4 Mar 2021 |
| Utility: SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL Filling date: 6 Sep 2025 Issue date: 4 Mar 2021 | 11 Nov 2020 | 4 Mar 2021 |
| Utility: METHODS OF OPTICAL DEVICE FABRICATION USING AN ELECTRON BEAM APPARATUS Filling date: 6 Sep 2025 Issue date: 4 Mar 2021 | 26 Oct 2020 | 4 Mar 2021 |
