Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock - Restricted Stock Units 2,189 N/A N/A Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 2,189 N/A N/A Sale
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 876 $348.16 $304,988 Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,437 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 1,437 N/A N/A Sale
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 875 $348.16 $304,640 Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,379 N/A N/A Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 1,379 N/A N/A Sale
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 420 $348.16 $146,227 Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock - Restricted Stock Units 690 N/A N/A Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 690 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock - Restricted Stock Units 3,161 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock 3,161 N/A N/A Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock - Restricted Stock Units 6,897 N/A N/A Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 6,897 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock - Restricted Stock Units 2,874 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock 2,874 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,340 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 1,340 N/A N/A Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock - Restricted Stock Units 6,432 N/A N/A Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 6,432 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock - Restricted Stock Units 3,752 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock 3,752 N/A N/A Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,394 N/A N/A Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 1,394 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock - Restricted Stock Units 3,216 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock 3,216 N/A N/A Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock - Restricted Stock Units 643 N/A N/A Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 643 N/A N/A Sale
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 96 N/A N/A Sale
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 96 N/A N/A Sale
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 136 N/A N/A Sale
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 5,000 N/A N/A Sale
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock 1,418 N/A N/A Purchase
MOORE GARY B director director
Common Stock 377 N/A N/A Sale
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 15,000 $309.95 $4,649,250 Sale
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock 3,795 $322.69 $1,224,609 Sale
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 274 $329.38 $90,250 Sale
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 1,287 $300.9 $387,258 Sale
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 4,216 $301.6 $1,271,546 Sale
KENNEDY KEVIN director director
Common Stock 2,431 $289.62 $704,056 Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 2,000 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 2,000 N/A N/A Sale
KENNEDY KEVIN director director
Common Stock 2,431 N/A N/A Sale
KENNEDY KEVIN director director
Common Stock 2,431 $289.62 $704,056 Sale
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock 3,415 $236.13 $806,384 Sale
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 758 $235.13 $178,229 Sale
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 632 $235.13 $148,602 Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 1,505 N/A N/A Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,505 N/A N/A