Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock - Restricted Stock Units 5,018 N/A N/A Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,505 N/A N/A Option
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 1,505 N/A N/A Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock - Restricted Stock Units 8,363 N/A N/A Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 1,254 N/A N/A Option
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock - Restricted Stock Units 1,254 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock 7,527 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock - Restricted Stock Units 7,527 N/A N/A Option
CALDERONI ROBERT director director
Common Stock 1,162 N/A N/A Option
MYERS MARIE director director
Common Stock - Restricted Stock Units 869 N/A N/A Option
CALDERONI ROBERT director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
BARNHOLT EDWARD W director, other: Chairman of the Board director, other: Chairman of th..
Common Stock - Restricted Stock Units 1,569 N/A N/A Option
PENG VICTOR director director
Common Stock 1,162 N/A N/A Option
RANGO ROBERT A. director director
Common Stock 1,162 N/A N/A Option
PENG VICTOR director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
KENNEDY KEVIN director director
Common Stock 1,162 N/A N/A Option
HANLEY JENEANNE MICHELLE director director
Common Stock 1,162 N/A N/A Option
KENNEDY KEVIN director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
PATEL KIRAN M director director
Common Stock 1,162 N/A N/A Option
PATEL KIRAN M director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
MYERS MARIE director director
Common Stock 869 N/A N/A Option
HIGASHI EMIKO director director
Common Stock 1,162 N/A N/A Option
MOORE GARY B director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
HIGASHI EMIKO director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
BARNHOLT EDWARD W director, other: Chairman of the Board director, other: Chairman of th..
Common Stock 1,569 N/A N/A Option
HANLEY JENEANNE MICHELLE director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Option
MOORE GARY B director director
Common Stock 1,162 N/A N/A Option
RANGO ROBERT A. director director
Common Stock - Restricted Stock Units 1,162 N/A N/A Sale
KENNEDY KEVIN director director
Common Stock 2,500 $201.42 $503,543 Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock 1,757 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 1,171 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock - Restricted Stock Units 1,757 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 1,171 N/A N/A Sale
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 1,129 $181.19 $204,564 Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 2,240 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 2,240 N/A N/A Sale
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 2,421 $199.84 $483,813 Sale
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock 9,954 $206.73 $2,057,790 Sale
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 35,115 $211.05 $7,410,951 Sale
PATEL KIRAN M director director
Common Stock 9,000 N/A N/A Sale
KIRLOSKAR VIRENDRA A officer: SVP & Chief Accounting Officer officer: SVP & Chief Accounting..
Common Stock 853 $201.86 $172,187 Sale
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock 3,547 $201.86 $715,997 Sale
LORIG BRIAN officer: Executive Vice President officer: Executive Vice President
Common Stock 1,182 $201.86 $238,599 Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock 28,140 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock - Restricted Stock Units 5,472 N/A N/A Option
HIGGINS BREN D. officer: EVP & Chief Financial Officer officer: EVP & Chief Financial ..
Common Stock - Restricted Stock Units 7,035 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock 2,345 N/A N/A Option
DONZELLA ORESTE officer: Executive Vice President officer: Executive Vice President
Common Stock - Restricted Stock Units 2,345 N/A N/A Option
WALLACE RICHARD P director, officer: President and CEO director, officer: President an..
Common Stock - Restricted Stock Units 28,140 N/A N/A Option
KHAN AHMAD A. officer: President, Semi Proc. Control officer: President, Semi Proc. ..
Common Stock 5,472 N/A N/A