| Utility: Process optimization using design of experiments and response surface models Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 7 Oct 2019 | 13 Jul 2021 |
| Utility: Low profile wafer manipulator Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 6 Aug 2019 | 13 Jul 2021 |
| Utility: Micro stigmator array for multi electron beam system Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 5 Feb 2020 | 6 Jul 2021 |
| Utility: Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspection Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 25 Sep 2019 | 6 Jul 2021 |
| Utility: Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 9 Oct 2019 | 29 Jun 2021 |
| Utility: Magneto-optic Kerr effect metrology systems Filling date: 6 Sep 2025 Issue date: 22 Jun 2021 | 17 Mar 2020 | 22 Jun 2021 |
| Utility: System and method for converting backside surface roughness to frontside overlay Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 6 Mar 2020 | 15 Jun 2021 |
| Utility: System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 19 Nov 2019 | 15 Jun 2021 |
| Utility: Multi-wavelength interferometry for defect classification Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 26 Aug 2019 | 25 May 2021 |
| Utility: Multiple-tool parameter set configuration and misregistration measurement system and method Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 23 Aug 2019 | 25 May 2021 |
| Utility: Broadband ultraviolet illumination sources Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 20 May 2020 | 18 May 2021 |
| Utility: Stochastic reticle defect dispositioning Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 | 19 Mar 2020 | 27 Apr 2021 |
| Utility: Field-to-field corrections using overlay targets Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 | 8 Nov 2019 | 27 Apr 2021 |
| Utility: Sensitive particle detection with spatially-varying polarization rotator and polarizer Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 20 Sep 2019 | 16 Mar 2021 |
| Utility: Radial polarizer for particle detection Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 20 Sep 2019 | 9 Mar 2021 |
| Utility: Electron gun and electron microscope Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 11 Sep 2019 | 9 Mar 2021 |
| Utility: Strontium tetraborate as optical coating material Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 16 Mar 2020 | 16 Feb 2021 |
| Utility: File selection for test image to design alignment Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 7 Nov 2019 | 16 Feb 2021 |
| Utility: Detecting defects in a logic region on a wafer Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 18 Aug 2019 | 16 Feb 2021 |
| Utility: Dispositioning defects detected on extreme ultraviolet photomasks Filling date: 6 Sep 2025 Issue date: 15 Dec 2020 | 6 Sep 2019 | 15 Dec 2020 |
| Utility: Magneto-optic systems with multi-ID disk positioning Filling date: 6 Sep 2025 Issue date: 8 Dec 2020 | 28 Jul 2015 | 8 Dec 2020 |
| Utility: Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology Filling date: 6 Sep 2025 Issue date: 10 Nov 2020 | 30 Jun 2016 | 10 Nov 2020 |
| Utility: Multi-mirror laser sustained plasma light source Filling date: 6 Sep 2025 Issue date: 20 Oct 2020 | 19 Jul 2019 | 20 Oct 2020 |
| Utility: Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafers Filling date: 6 Sep 2025 Issue date: 20 Oct 2020 | 19 Jul 2019 | 20 Oct 2020 |
| Utility: Dispersion model for band gap tracking Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 | 1 Aug 2019 | 8 Sep 2020 |
| Utility: Scanning differential interference contrast in an imaging system design Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 26 Sep 2019 | 7 Jul 2020 |
