KLA
Utility Patent Applications
Last updated:
List of all KLA patents 231 in total
| Status | Patent |
|---|---|
Application | Utility: MULTI-FIELD SCANNING OVERLAY METROLOGY Filling date: 6 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: Secure Remote Collaboration for Equipment in a Manufacturing Facility Filling date: 6 Sep 2025 Issue date: 1 Sep 2022 |
Application | Utility: Full Beam Metrology For X-Ray Scatterometry Systems Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: METHODS FOR IMPROVING OPTICAL INSPECTION AND METROLOGY IMAGE QUALITY USING CHIP DESIGN DATA Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: VERTICAL CONVOLUTE METAL BELLOWS FOR ROTARY MOTION, VACUUM SEALING, AND PRESSURE SEALING Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: Dual Vacuum Seal Filling date: 6 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: SYSTEMS AND METHODS FOR EVALUATING THE RELIABILITY OF SEMICONDUCTOR DIE PACKAGES Filling date: 6 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: Method and Apparatus for EUV Mask Inspection Filling date: 6 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: THREE-DIMENSIONAL IMAGING WITH ENHANCED RESOLUTION Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: BACK-ILLUMINATED SENSOR WITH BORON LAYER DEPOSITED USING PLASMA ATOMIC LAYER DEPOSITION Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: HIGH RESOLUTION ELECTRON BEAM APPARATUS WITH DUAL-APERTURE SCHEMES Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CORRECTION PLATES Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: SENSITIVITY IMPROVEMENT OF OPTICAL AND SEM DEFECTION INSPECTION Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: MEASUREMENT OF PROPERTIES OF PATTERNED PHOTORESIST Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: PROCESS CONDITION SENSING APPARATUS Filling date: 6 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: SYSTEM AND METHOD FOR FOCUS CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING A FOCUS-SENSITIVE METROLOGY TARGET Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: METHOD AND SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT Filling date: 6 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: MULTI-BEAM ELECTRONICS SCAN Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: Methods And Systems For Compact, Small Spot Size Soft X-Ray Scatterometry Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: Integration of an Optical Height Sensor in Mask Inspection Tools Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: SYSTEM AND METHOD FOR AUTOMATICALLY IDENTIFYING DEFECT-BASED TEST COVERAGE GAPS IN SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMINATION SOURCE HAVING MODIFIED PUPIL POWER DISTRIBUTION Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: Characterization System and Method With Guided Defect Discovery Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: IMAGING OVERLAY TARGETS USING MOIRE ELEMENTS AND ROTATIONAL SYMMETRY ARRANGEMENTS Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: METHOD OF MEASURING MISREGISTRATION IN THE MANUFACTURE OF TOPOGRAPHIC SEMICONDUCTOR DEVICE WAFERS Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: System and Method for Error Reduction for Metrology Measurements Filling date: 6 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: ELECTRON SOURCE WITH MAGNETIC SUPPRESSOR ELECTRODE Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: Alignment of a Specimen for Inspection and Other Processes Filling date: 6 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: SYSTEMS AND METHODS FOR DETERMINING MEASUREMENT LOCATION IN SEMICONDUCTOR WAFER METROLOGY Filling date: 6 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: Methods And Systems For Determining Quality Of Semiconductor Measurements Filling date: 6 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: SYSTEMS AND METHODS FOR SCATTEROMETRIC SINGLE-WAVELENGTH MEASUREMENT OF MISREGISTRATION AND AMELIORATION THEREOF Filling date: 6 Sep 2025 Issue date: 17 Mar 2022 |
Application | Utility: MAGNETIC IMMERSION ELECTRON GUN Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: UNSUPERVISED PATTERN SYNONYM DETECTION USING IMAGE HASHING Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: BINNING-ENHANCED DEFECT DETECTION METHOD FOR THREE-DIMENSIONAL WAFER STRUCTURES Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: ACTIVE RETICLE CARRIER FOR IN SITU STAGE CORRECTION Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: Coolant Microleak Sensor for a Vacuum System Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: Setting Up Inspection of a Specimen Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: Programmable and Reconfigurable Mask with MEMS Micro-Mirror Array for Defect Detection Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: Scanning Electron Microscope Image Anchoring to Design for Array Filling date: 6 Sep 2025 Issue date: 24 Feb 2022 |
Application | Utility: OPTICAL IMAGE CONTRAST METRIC FOR OPTICAL TARGET SEARCH Filling date: 6 Sep 2025 Issue date: 17 Feb 2022 |
Application | Utility: MATERIAL RECOVERY SYSTEMS FOR OPTICAL COMPONENTS Filling date: 6 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: DEVICE-LIKE OVERLAY METROLOGY TARGETS DISPLAYING MOIRE EFFECTS Filling date: 6 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: Metrology Targets for High Topography Semiconductor Stacks Filling date: 6 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: Process-Induced Displacement Characterization During Semiconductor Production Filling date: 6 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: TARGET AND ALGORITHM TO MEASURE OVERLAY BY MODELING BACK SCATTERING ELECTRONS ON OVERLAPPING STRUCTURES Filling date: 6 Sep 2025 Issue date: 6 Jan 2022 |
Showing 1 to 50 of 231 patents.