| Utility: Laser sustained plasma light source with high pressure flow Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 | 25 Jan 2021 | 20 Sep 2022 |
| Utility: BBP assisted defect detection flow for SEM images Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 | 17 Apr 2020 | 20 Sep 2022 |
| Utility: Thin pellicle material for protection of solid-state electron detectors Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 | 10 Mar 2021 | 13 Sep 2022 |
| Utility: Broadband light interferometry for focal-map generation in photomask inspection Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 | 5 Oct 2020 | 13 Sep 2022 |
| Utility: Method of manufacturing a semiconductor device and process control system for a semiconductor manufacturing assembly Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 | 19 Feb 2021 | 30 Aug 2022 |
| Utility: Scanning scatterometry overlay measurement Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 | 4 Jan 2021 | 30 Aug 2022 |
| Utility: System and method for inspection using tensor decomposition and singular value decomposition Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 | 16 Jan 2020 | 30 Aug 2022 |
| Utility: Computationally efficient x-ray based overlay measurement Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 | 17 Dec 2019 | 30 Aug 2022 |
| Utility: Soft gripper with multizone control to allow individual joint articulation Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 | 13 Nov 2019 | 30 Aug 2022 |
| Utility: Broadband ultraviolet illumination sources Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 | 17 May 2021 | 23 Aug 2022 |
| Utility: System, method and apparatus for polarization control Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 12 Feb 2021 | 16 Aug 2022 |
| Utility: Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 11 Jan 2021 | 16 Aug 2022 |
| Utility: Multi-controller inspection system Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 29 Dec 2020 | 16 Aug 2022 |
| Utility: Controlling a process for inspection of a specimen Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 23 Sep 2020 | 16 Aug 2022 |
| Utility: Light modulated electron source Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 14 Sep 2020 | 16 Aug 2022 |
| Utility: Statistical learning-based mode selection for multi-mode inspection Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 26 May 2020 | 16 Aug 2022 |
| Utility: Signal-domain adaptation for metrology Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 | 20 Dec 2019 | 16 Aug 2022 |
| Utility: Equi-probability defect detection Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 | 23 Sep 2020 | 9 Aug 2022 |
| Utility: System and method for generation of wafer inspection critical areas Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 | 6 Jul 2020 | 9 Aug 2022 |
| Utility: Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 | 25 Jun 2020 | 9 Aug 2022 |
| Utility: Machine learning for metrology measurements Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 | 23 Dec 2019 | 9 Aug 2022 |
| Utility: Apparatus and method for gray field imaging Filling date: 6 Sep 2025 Issue date: 26 Jul 2022 | 27 Nov 2020 | 26 Jul 2022 |
| Utility: Metrics for asymmetric wafer shape characterization Filling date: 6 Sep 2025 Issue date: 19 Jul 2022 | 9 Jun 2020 | 19 Jul 2022 |
| Utility: Method of fabricating particle size standards on substrates Filling date: 6 Sep 2025 Issue date: 12 Jul 2022 | 18 Feb 2021 | 12 Jul 2022 |
| Utility: On-the-fly scatterometry overlay metrology target Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 | 11 Dec 2020 | 5 Jul 2022 |
| Utility: Method for process monitoring with optical inspections Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 | 27 Jul 2020 | 5 Jul 2022 |
| Utility: Methods and systems for inspection of semiconductor structures with automatically generated defect features Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 | 16 Jan 2020 | 5 Jul 2022 |
| Utility: Laser closed power loop with an acousto-optic modulator for power modulation Filling date: 6 Sep 2025 Issue date: 28 Jun 2022 | 7 Aug 2020 | 28 Jun 2022 |
| Utility: Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection Filling date: 6 Sep 2025 Issue date: 21 Jun 2022 | 27 Aug 2020 | 21 Jun 2022 |
| Utility: Strontium tetraborate as optical coating material Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 8 Jan 2021 | 14 Jun 2022 |
| Utility: System and method for tilt calculation based on overlay metrology measurements Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 2 Nov 2020 | 14 Jun 2022 |
| Utility: System and method for photomultiplier tube image correction Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 24 Sep 2020 | 14 Jun 2022 |
| Utility: System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurements Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 8 Sep 2020 | 14 Jun 2022 |
| Utility: Darkfield imaging of grating target structures for overlay measurement Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 18 Aug 2020 | 14 Jun 2022 |
| Utility: Tilted slit confocal system configured for automated focus detection and tracking Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 17 Aug 2020 | 7 Jun 2022 |
| Utility: Device-like overlay metrology targets displaying Moire effects Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 16 Jul 2020 | 7 Jun 2022 |
| Utility: System and method for error reduction for metrology measurements Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 14 Jul 2020 | 7 Jun 2022 |
| Utility: Metrology system and method for measuring diagonal diffraction-based overlay targets Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 12 Jun 2020 | 7 Jun 2022 |
| Utility: Measurement modes for overlay Filling date: 6 Sep 2025 Issue date: 31 May 2022 | 12 Oct 2020 | 31 May 2022 |
| Utility: Droplet generation for a laser produced plasma light source Filling date: 6 Sep 2025 Issue date: 24 May 2022 | 23 Nov 2020 | 24 May 2022 |
| Utility: Combined transmitted and reflected light imaging of internal cracks in semiconductor devices Filling date: 6 Sep 2025 Issue date: 24 May 2022 | 12 Jul 2020 | 24 May 2022 |
| Utility: Electron beam system for inspection and review of 3D devices Filling date: 6 Sep 2025 Issue date: 17 May 2022 | 7 Apr 2021 | 17 May 2022 |
| Utility: Common path mode fiber tip diffraction interferometer for wavefront measurement Filling date: 6 Sep 2025 Issue date: 17 May 2022 | 13 Mar 2020 | 17 May 2022 |
| Utility: Scaling metric for quantifying metrology sensitivity to process variation Filling date: 6 Sep 2025 Issue date: 17 May 2022 | 13 Jan 2020 | 17 May 2022 |
| Utility: Deep generative models for optical or other mode selection Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 14 Jul 2021 | 10 May 2022 |
| Utility: Image alignment setup for specimens with intra- and inter-specimen variations using unsupervised learning and adaptive database generation methods Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 28 May 2021 | 10 May 2022 |
| Utility: Print check repeater defect detection Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 30 Apr 2021 | 10 May 2022 |
| Utility: Determining focus settings for specimen scans Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 8 Mar 2021 | 10 May 2022 |
| Utility: Localized purge module for substrate handling Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 | 11 Sep 2020 | 26 Apr 2022 |
| Utility: Method for measuring an electric property of a test sample Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 | 18 Mar 2020 | 19 Apr 2022 |
