Nova Ltd.
Utility Patents
Last updated:
List of all Nova Ltd. patents 17 in total
| Status | Patent |
|---|---|
Grant | Utility: X-ray based measurements in patterned structure Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Metrology and process control for semiconductor manufacturing Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Optical phase measurement method and system Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Method and system for processing patterned structures Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Scatterometry system and method Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: TEM-based metrology method and system Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Method and system for optical characterization of patterned samples Filling date: 6 Sep 2025 Issue date: 29 Dec 2020 |
Grant | Utility: Method and system for optical metrology in patterned structures Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Optical system and method for measurements of samples Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Hybrid metrology method and system Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Optical phase measurement system and method Filling date: 6 Sep 2025 Issue date: 26 May 2020 |
Grant | Utility: Measuring complex structures in semiconductor fabrication Filling date: 6 Sep 2025 Issue date: 26 May 2020 |
Grant | Utility: Raman spectroscopy based measurements in patterned structures Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Method for use in process control of manufacture of patterned sample Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Scatterometry system and method Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 |
Grant | Utility: Optical critical dimension metrology Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 |
Grant | Utility: Optical phase measurement method and system Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 |
Showing 1 to 17 of 17 patents.