Axcelis Technologies
Patents, Design & Utilities
Last updated:
List of all Axcelis Technologies patents 60 in total
| Status | Patent |
|---|---|
Grant | Utility: Scan and corrector magnet designs for high throughput scanned beam ion implanter Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Lanthanated tungsten ion source and beamline components Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: System and method of arc detection using dynamic threshold Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Beam profiling speed enhancement for scanned beam implanters Filling date: 6 Sep 2025 Issue date: 19 Nov 2019 |
Application | Utility: HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING Filling date: 6 Sep 2025 Issue date: 14 Nov 2019 |
Application | Utility: IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL Filling date: 6 Sep 2025 Issue date: 3 Oct 2019 |
Application | Utility: TWO-AXIS VARIABLE WIDTH MASS RESOLVING APERTURE WITH FAST ACTING SHUTTER MOTION Filling date: 6 Sep 2025 Issue date: 5 Sep 2019 |
Grant | Utility: Wafer cooling system and method Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 |
Grant | Utility: Two-axis variable width mass resolving aperture with fast acting shutter motion Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 |
Grant | Utility: In situ beam current monitoring and control in scanned ion implantation systems Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 |
Showing 50 to 60 of 60 patents.