| Utility: DEFLECTION RESTRAINT SYSTEM FOR BUILD PLATE IN ADDITIVE MANUFACTURING Filling date: 7 Sep 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR Filling date: 7 Sep 2025 Issue date: 25 Feb 2021 | 1 Jun 2016 | 25 Feb 2021 |
| Utility: Predictive spatial digital design of experiment for advanced semiconductor process optimization and control Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 18 May 2020 | 23 Feb 2021 |
| Utility: Gate all around device and method of formation using angled ions Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 18 Feb 2020 | 23 Feb 2021 |
| Utility: Methods and apparatus for etching semiconductor structures Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 30 Jan 2020 | 23 Feb 2021 |
| Utility: Electrostatic chuck assembly having a dielectric filler Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 5 Nov 2019 | 23 Feb 2021 |
| Utility: Attachment feature removal from photomask in extreme ultraviolet lithography application Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 23 Oct 2019 | 23 Feb 2021 |
| Utility: Linerless continuous amorphous metal films Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 8 Oct 2019 | 23 Feb 2021 |
| Utility: Replacement metal gate formation of PMOS ultra-low voltage devices using a thermal implant Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 4 Sep 2019 | 23 Feb 2021 |
| Utility: Contact over active gate structure Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 3 Sep 2019 | 23 Feb 2021 |
| Utility: Contact over active gate structure Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 3 Sep 2019 | 23 Feb 2021 |
| Utility: Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 15 Aug 2019 | 23 Feb 2021 |
| Utility: Barrier for copper metallization and methods of forming Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 3 May 2019 | 23 Feb 2021 |
| Utility: Geometric control of bottom-up pillars for patterning applications Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 24 Apr 2019 | 23 Feb 2021 |
| Utility: Multi-substrate processing on digital lithography systems Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 19 Mar 2019 | 23 Feb 2021 |
| Utility: Dual zone common catch heat exchanger/chiller Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 8 Mar 2019 | 23 Feb 2021 |
| Utility: Apparatus for handling various sized substrates Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 11 Feb 2019 | 23 Feb 2021 |
| Utility: Methods for forming a metal silicide interconnection nanowire structure Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 17 Jan 2019 | 23 Feb 2021 |
| Utility: Methods and apparatus for wafer temperature measurement Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 16 Jan 2019 | 23 Feb 2021 |
| Utility: Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 19 Dec 2018 | 23 Feb 2021 |
| Utility: Smart chamber and smart chamber components Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 28 Nov 2018 | 23 Feb 2021 |
| Utility: Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 13 Nov 2018 | 23 Feb 2021 |
| Utility: Adaptive control of wafer-to-wafer variability in device performance in advanced semiconductor processes Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 9 Oct 2018 | 23 Feb 2021 |
| Utility: Gas diffuser support structure for reduced particle generation Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 31 Aug 2018 | 23 Feb 2021 |
| Utility: Thermal processing susceptor Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 23 Aug 2018 | 23 Feb 2021 |
| Utility: Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 28 Dec 2017 | 23 Feb 2021 |
| Utility: Rare-earth oxide based coatings based on ion assisted deposition Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 11 Dec 2017 | 23 Feb 2021 |
| Utility: RFID part authentication and tracking of processing components Filling date: 7 Sep 2025 Issue date: 23 Feb 2021 | 13 Nov 2017 | 23 Feb 2021 |
| Utility: TEXTURIZING A SURFACE WITHOUT BEAD BLASTING Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 4 Nov 2020 | 18 Feb 2021 |
| Utility: METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRIC DEPOSITION Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 16 Aug 2020 | 18 Feb 2021 |
| Utility: TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 14 Aug 2020 | 18 Feb 2021 |
| Utility: HEATED SUBSTRATE SUPPORT WITH THERMAL BAFFLES Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 12 Aug 2020 | 18 Feb 2021 |
| Utility: PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 11 Aug 2020 | 18 Feb 2021 |
| Utility: Molybdenum Thin Films By Oxidation-Reduction Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 11 Aug 2020 | 18 Feb 2021 |
| Utility: Low-K Dielectric Films Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 10 Aug 2020 | 18 Feb 2021 |
| Utility: DEPOSITION OF RHENIUM-CONTAINING THIN FILMS Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 10 Aug 2020 | 18 Feb 2021 |
| Utility: Non-Conformal High Selectivity Film For Etch Critical Dimension Control Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 10 Aug 2020 | 18 Feb 2021 |
| Utility: APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 10 Aug 2020 | 18 Feb 2021 |
| Utility: CHAMBER CONFIGURATIONS FOR CONTROLLED DEPOSITION Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 6 Aug 2020 | 18 Feb 2021 |
| Utility: SLURRY TEMPERATURE CONTROL BY MIXING AT DISPENSING Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 26 Mar 2020 | 18 Feb 2021 |
| Utility: LOW-TEMPERATURE METAL CMP FOR MINIMIZING DISHING AND CORROSION, AND IMPROVING PAD ASPERITY Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 26 Mar 2020 | 18 Feb 2021 |
| Utility: SEMICONDUCTOR SUBSTRATE INCLUDING STRESS MEMORIZATION LAYER Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 16 Aug 2019 | 18 Feb 2021 |
| Utility: GATE DEVICES AND METHODS OF FORMATION USING ANGLED IONS Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 16 Aug 2019 | 18 Feb 2021 |
| Utility: SYMMETRIC FLOW VALVE FOR HIGHER FLOW CONDUCTANCE Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 16 Aug 2019 | 18 Feb 2021 |
| Utility: HYBRID WAFER DICING APPROACH USING A UNIFORM ROTATING BEAM LASER SCRIBING PROCESS AND PLASMA ETCH PROCESS Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 14 Aug 2019 | 18 Feb 2021 |
| Utility: HYBRID WAFER DICING APPROACH USING AN ACTIVELY-FOCUSED LASER BEAM LASER SCRIBING PROCESS AND PLASMA ETCH PROCESS Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 13 Aug 2019 | 18 Feb 2021 |
| Utility: Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 1 Mar 2019 | 18 Feb 2021 |
| Utility: Bottom-Up Approach To High Aspect Ratio Hole Formation In 3D Memory Structures Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 28 Aug 2018 | 18 Feb 2021 |
| Utility: Self-Aligned Structures From Sub-Oxides Filling date: 7 Sep 2025 Issue date: 18 Feb 2021 | 28 Aug 2018 | 18 Feb 2021 |
| Utility: Reserving spatial light modulator sections to address field non-uniformities Filling date: 7 Sep 2025 Issue date: 16 Feb 2021 | 8 Jun 2020 | 16 Feb 2021 |
