| Utility: Metrology for OLED manufacturing using photoluminescence spectroscopy Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 25 Jan 2019 | 2 Mar 2021 |
| Utility: Apparatus and method for controlling ion beam using electrostatic filter Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 20 Nov 2018 | 2 Mar 2021 |
| Utility: Optical component having depth modulated angled gratings and method of formation Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 23 Oct 2018 | 2 Mar 2021 |
| Utility: Integration of dual remote plasmas sources for flowable CVD Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 27 Nov 2017 | 2 Mar 2021 |
| Utility: Determining susceptor service life in a plasma processing chamber Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 31 Aug 2017 | 2 Mar 2021 |
| Utility: Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereof Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 18 Jul 2017 | 2 Mar 2021 |
| Utility: Freeform distortion correction Filling date: 6 Nov 2025 Issue date: 2 Mar 2021 | 15 May 2017 | 2 Mar 2021 |
| Utility: SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED LOAD PORT Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 9 Nov 2020 | 25 Feb 2021 |
| Utility: TREATMENTS TO ENHANCE MATERIAL STRUCTURES Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 6 Nov 2020 | 25 Feb 2021 |
| Utility: ANNEALING APPARATUS USING TWO WAVELENGTHS OF RADIATION Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 5 Nov 2020 | 25 Feb 2021 |
| Utility: CONTINUOUS SPECTRA TRANSMISSION PYROMETRY Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 30 Oct 2020 | 25 Feb 2021 |
| Utility: CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 26 Oct 2020 | 25 Feb 2021 |
| Utility: Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 19 Aug 2020 | 25 Feb 2021 |
| Utility: ADDITIVE MANUFACTURING OF POLISHING PADS Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 18 Aug 2020 | 25 Feb 2021 |
| Utility: MAPPING OF A REPLACEMENT PARTS STORAGE CONTAINER Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 14 Aug 2020 | 25 Feb 2021 |
| Utility: CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 11 Aug 2020 | 25 Feb 2021 |
| Utility: DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 11 Dec 2019 | 25 Feb 2021 |
| Utility: Polishing Head with Membrane Position Control Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 6 Dec 2019 | 25 Feb 2021 |
| Utility: CARRIER HEAD WITH SEGMENTED SUBSTRATE CHUCK Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 19 Nov 2019 | 25 Feb 2021 |
| Utility: METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING MICROWAVE ENERGY Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: METHODS AND APPARATUS FOR DETERMINING ENDPOINTS FOR CHEMICAL MECHANICAL PLANARIZATION IN WAFER-LEVEL PACKAGING APPLICATIONS Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE USING NON-CONTACT TEMPERATURE MEASUREMENT Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: METHODS AND APPARATUS FOR CONTACTLESS SUBSTRATE WARPAGE CORRECTION Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: METHODS AND APPARATUS FOR DEPOSITING ALUMINUM BY PHYSICAL VAPOR DEPOSITION (PVD) Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: DEFLECTION RESTRAINT SYSTEM FOR BUILD PLATE IN ADDITIVE MANUFACTURING Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 20 Aug 2019 | 25 Feb 2021 |
| Utility: ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR Filling date: 6 Nov 2025 Issue date: 25 Feb 2021 | 1 Jun 2016 | 25 Feb 2021 |
| Utility: Predictive spatial digital design of experiment for advanced semiconductor process optimization and control Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 18 May 2020 | 23 Feb 2021 |
| Utility: Gate all around device and method of formation using angled ions Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 18 Feb 2020 | 23 Feb 2021 |
| Utility: Methods and apparatus for etching semiconductor structures Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 30 Jan 2020 | 23 Feb 2021 |
| Utility: Electrostatic chuck assembly having a dielectric filler Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 5 Nov 2019 | 23 Feb 2021 |
| Utility: Attachment feature removal from photomask in extreme ultraviolet lithography application Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 23 Oct 2019 | 23 Feb 2021 |
| Utility: Linerless continuous amorphous metal films Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 8 Oct 2019 | 23 Feb 2021 |
| Utility: Replacement metal gate formation of PMOS ultra-low voltage devices using a thermal implant Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 4 Sep 2019 | 23 Feb 2021 |
| Utility: Contact over active gate structure Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 3 Sep 2019 | 23 Feb 2021 |
| Utility: Contact over active gate structure Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 3 Sep 2019 | 23 Feb 2021 |
| Utility: Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 15 Aug 2019 | 23 Feb 2021 |
| Utility: Barrier for copper metallization and methods of forming Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 3 May 2019 | 23 Feb 2021 |
| Utility: Geometric control of bottom-up pillars for patterning applications Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 24 Apr 2019 | 23 Feb 2021 |
| Utility: Multi-substrate processing on digital lithography systems Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 19 Mar 2019 | 23 Feb 2021 |
| Utility: Dual zone common catch heat exchanger/chiller Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 8 Mar 2019 | 23 Feb 2021 |
| Utility: Apparatus for handling various sized substrates Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 11 Feb 2019 | 23 Feb 2021 |
| Utility: Methods for forming a metal silicide interconnection nanowire structure Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 17 Jan 2019 | 23 Feb 2021 |
| Utility: Methods and apparatus for wafer temperature measurement Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 16 Jan 2019 | 23 Feb 2021 |
| Utility: Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 19 Dec 2018 | 23 Feb 2021 |
| Utility: Smart chamber and smart chamber components Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 28 Nov 2018 | 23 Feb 2021 |
| Utility: Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 13 Nov 2018 | 23 Feb 2021 |
| Utility: Adaptive control of wafer-to-wafer variability in device performance in advanced semiconductor processes Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 9 Oct 2018 | 23 Feb 2021 |
| Utility: Gas diffuser support structure for reduced particle generation Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 31 Aug 2018 | 23 Feb 2021 |
| Utility: Thermal processing susceptor Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 23 Aug 2018 | 23 Feb 2021 |
| Utility: Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment Filling date: 6 Nov 2025 Issue date: 23 Feb 2021 | 28 Dec 2017 | 23 Feb 2021 |
