| Utility: Tuning work function of p-metal work function films through vapor deposition Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 11 Apr 2019 | 25 May 2021 |
| Utility: High pressure and high temperature anneal chamber Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 8 Apr 2019 | 25 May 2021 |
| Utility: Protection of components from corrosion Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 22 Feb 2019 | 25 May 2021 |
| Utility: Y.sub.2O.sub.3--ZrO.sub.2 erosion resistant material for chamber components in plasma environments Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 19 Feb 2019 | 25 May 2021 |
| Utility: Carrier adapter insert apparatus and carrier adapter insert detection methods Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 13 Aug 2018 | 25 May 2021 |
| Utility: Deposition radial and edge profile tunability through independent control of TEOS flow Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 6 Jun 2018 | 25 May 2021 |
| Utility: Methods and apparatus for low temperature silicon nitride films Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 11 Jan 2018 | 25 May 2021 |
| Utility: Apparatus and methods for depositing ALD films with enhanced chemical exchange Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 24 Apr 2017 | 25 May 2021 |
| Utility: Ceramic coated quartz lid for processing chamber Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 16 Mar 2017 | 25 May 2021 |
| Utility: METHOD FOR FAST LOADING SUBSTRATES IN A FLAT PANEL TOOL Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 25 Jan 2021 | 20 May 2021 |
| Utility: Showerhead with Embedded Nut Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 16 Nov 2020 | 20 May 2021 |
| Utility: MULTI-FINGER ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND METHODS ADAPTED TO TRANSPORT MULTIPLE SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 2 Mar 2020 | 20 May 2021 |
| Utility: CONTROLLING POSITIVE FEEDBACK IN FILAMENTARY RRAM STRUCTURES Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 20 Nov 2019 | 20 May 2021 |
| Utility: Modular LED Heater Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 14 Nov 2019 | 20 May 2021 |
| Utility: BONDING VERTICAL CAVITY SURFACE EMITTING LASER DIE ONTO A SILICON WAFER Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 14 Nov 2019 | 20 May 2021 |
| Utility: APPARATUS AND METHODS FOR IMPROVING THERMAL CHEMICAL VAPOR DEPOSITION (CVD) UNIFORMITY Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 10 Aug 2018 | 20 May 2021 |
| Utility: EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 18 Apr 2018 | 20 May 2021 |
| Utility: Dynamic cooling control for thermal stabilization for lithography system Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 28 Sep 2020 | 18 May 2021 |
| Utility: Sputtering target with backside cooling grooves Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 2 Jun 2020 | 18 May 2021 |
| Utility: High-current ion implanter and method for controlling ion beam using high-current ion implanter Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 16 Aug 2019 | 18 May 2021 |
| Utility: Hybrid wafer dicing approach using a spatially multi-focused laser beam laser scribing process and plasma etch process Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 6 Aug 2019 | 18 May 2021 |
| Utility: Precursor delivery system and methods related thereto Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 2 Jul 2019 | 18 May 2021 |
| Utility: Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 24 May 2019 | 18 May 2021 |
| Utility: Micro resonator array system Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 22 Feb 2019 | 18 May 2021 |
| Utility: Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 5 Feb 2019 | 18 May 2021 |
| Utility: PVD titanium dioxide formation using sputter etch to halt onset of crystalinity in thick films Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 28 Jan 2019 | 18 May 2021 |
| Utility: Carrier head membrane with regions of different roughness Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 20 Dec 2018 | 18 May 2021 |
| Utility: Advanced sputter targets for ion generation Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 15 Nov 2018 | 18 May 2021 |
| Utility: Printing chemical mechanical polishing pad having window or controlled porosity Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 19 Apr 2018 | 18 May 2021 |
| Utility: Gapfill using reactive anneal Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 5 Apr 2018 | 18 May 2021 |
| Utility: Additive manufacturing with dispensing of multiple powders Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 21 Mar 2018 | 18 May 2021 |
| Utility: Methods and apparatus for multi-cathode substrate processing Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 7 Feb 2018 | 18 May 2021 |
| Utility: Multi-layer coating with diffusion barrier layer and erosion resistant layer Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 15 Dec 2017 | 18 May 2021 |
| Utility: Method of forming conformal epitaxial semiconductor cladding material over a fin field effect transistor (FINFET) device Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 12 Dec 2017 | 18 May 2021 |
| Utility: SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 16 Nov 2017 | 18 May 2021 |
| Utility: PVD buffer layers for LED fabrication Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 15 Jun 2016 | 18 May 2021 |
| Utility: TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR DEVICE MANUFACTURING PROCESSING TOOLS, AND PROCESSING METHODS Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 22 Jan 2021 | 13 May 2021 |
| Utility: METHODS AND APPARATUS FOR ETCHING SEMICONDUCTOR STRUCTURES Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 18 Jan 2021 | 13 May 2021 |
| Utility: HEATER SUPPORT KIT FOR BEVEL ETCH CHAMBER Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 17 Dec 2020 | 13 May 2021 |
| Utility: Silyl Pseudohalides For Silicon Containing Films Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 12 Nov 2020 | 13 May 2021 |
| Utility: GAS DELIVERY SYSTEMS AND METHODS Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 11 Nov 2020 | 13 May 2021 |
| Utility: REDUCED HYDROGEN DEPOSITION PROCESSES Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 11 Nov 2020 | 13 May 2021 |
| Utility: Ruthenium Film Deposition Using Low Valent Metal Precursors Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 11 Nov 2020 | 13 May 2021 |
| Utility: SYSTEMS AND METHODS FOR CONTROLLING NON-UNIFORMITY Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 10 Nov 2020 | 13 May 2021 |
| Utility: 3D NAND GATE STACK REINFORCEMENT Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 4 Nov 2020 | 13 May 2021 |
| Utility: CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 4 Nov 2020 | 13 May 2021 |
| Utility: METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 2 Nov 2020 | 13 May 2021 |
| Utility: METHODS OF PRODUCING SLANTED GRATINGS WITH VARIABLE ETCH DEPTHS Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 16 Oct 2020 | 13 May 2021 |
| Utility: FABRICATION OF PIEZOELECTRIC DEVICE WITH PMNPT LAYER Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 21 Nov 2019 | 13 May 2021 |
| Utility: PHYSICAL VAPOR DEPOSITION OF PIEZOELECTRIC FILMS Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 21 Nov 2019 | 13 May 2021 |
