Applied Materials
Utility Patents
Last updated:
List of all Applied Materials patents 1,752 in total
| Status | Patent |
|---|---|
Grant | Utility: Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability Filling date: 6 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Apparatus and method for providing uniform flow of gas Filling date: 6 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Circuits for edge ring control in shaped DC pulsed plasma process device Filling date: 6 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Patterned chuck for double-sided processing Filling date: 6 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Nucleation-free gap fill ALD process Filling date: 6 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Smart camera substrate Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Horizontal gate all around device nanowire air gap spacer formation Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Method of controlling ion energy distribution using a pulse generator Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Asymmetry correction via oriented wafer loading Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Substrate processing systems, apparatus, and methods with factory interface environmental controls Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Temperature measurement using etalons Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Paired dynamic parallel plate capacitively coupled plasmas Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Methods for filling features with ruthenium Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Heat treated ceramic substrate having ceramic coating Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Method for via formation by micro-imprinting Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Nanopowders, nanoceramic materials and methods of making and use thereof Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Methods and apparatus for detection and analysis of nanoparticles from semiconductor chamber parts Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Multi-layer deposition and treatment of silicon nitride films Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Using graphics processing unit for substrate routing and throughput modeling Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Extreme ultraviolet mask absorber matertals Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Extreme ultraviolet mask absorber matertals Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Extreme ultraviolet mask absorber materials Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Apparatus and methods for manipulating power at an edge ring in a plasma processing device Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Plasma processing using multiple radio frequency power feeds for improved uniformity Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Solid state battery fabrication Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Systems, apparatus, and methods for an improved load port backplane Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Methods of forming high boron-content hard mask materials Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: On stack overlay improvement for 3D NAND Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Extreme ultraviolet mask blank defect reduction Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Seal apparatus for an electroplating system Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Apparatus for selective gas injection and extraction Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Fault detection classification Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Multi-zone semiconductor substrate supports Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Semiconductor processing chamber for multiple precursor flow Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Method of forming self-aligned via Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Cap oxidation for FinFET formation Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Modulating film properties by optimizing plasma coupling materials Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Gas injection apparatus with heating channels Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Electroplating system Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Doping of metal barrier layers Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Apparatus and system including extraction optics having movable blockers Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Processing equipment component plating Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Multi zone electrostatic chuck Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Apparatus for enhancing flow uniformity in a process chamber Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Techniques for determining and correcting for expected dose variation during implantation of photoresist-coated substrates Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Post exposure processing apparatus Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: In-situ temperature mapping for epi chamber Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: In-situ DC plasma for cleaning pedestal heater Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Retaining ring with shaped surface Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Showing 350 to 400 of 1752 patents.