ASML Holding N.V.
Utility Patents
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Method to obtain a height map of a substrate having alignment marks, substrate alignment measuring apparatus and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Cascade defect inspection Filling date: 9 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Methods and apparatus for calculating substrate model parameters and controlling lithographic processing Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Electron beam inspection apparatus stage positioning Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Apparatus for multiple charged-particle beams Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Metrology apparatus Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Sensor apparatus and method for lithographic measurements Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Method to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Method of adapting feed-forward parameters Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Method to change an etch parameter Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Lithographic apparatus Filling date: 9 Sep 2025 Issue date: 5 Apr 2022 |
Grant | Utility: Alignment mark positioning in a lithographic process Filling date: 9 Sep 2025 Issue date: 5 Apr 2022 |
Grant | Utility: Method and apparatus for charged particle detection Filling date: 9 Sep 2025 Issue date: 5 Apr 2022 |
Grant | Utility: Selecting a set of locations associated with a measurement or feature on a substrate Filling date: 9 Sep 2025 Issue date: 5 Apr 2022 |
Grant | Utility: End facet protection for a radiation source and a method for use in metrology applications Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Control system and method Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Guided patterning device inspection Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Cleaning apparatus and methods of cleaning Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Metal-silicide-nitridation for stress reduction Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Cooling apparatus and plasma-cleaning station for cooling apparatus Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Apparatus using multiple beams of charged particles Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Cyclic error measurements and calibration procedures in interferometers Filling date: 9 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Multi-beam inspection apparatus with improved detection performance of signal electrons Filling date: 9 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Method for determining stack configuration of substrate Filling date: 9 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Methods using fingerprint and evolution analysis Filling date: 9 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Metrology apparatus with radiation source having multiple broadband outputs Filling date: 9 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Lithographic apparatus and a device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Frame assembly, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Frequency broadening apparatus and method Filling date: 9 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Metrology apparatus Filling date: 9 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Tubular linear actuator, patterning device masking device and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: System for monitoring a plasma Filling date: 9 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Sensor system Filling date: 9 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Inspection tool and method of determining a distortion of an inspection tool Filling date: 9 Sep 2025 Issue date: 15 Feb 2022 |
Grant | Utility: Inspection method and system Filling date: 9 Sep 2025 Issue date: 15 Feb 2022 |
Grant | Utility: Vibration isolation system and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 15 Feb 2022 |
Grant | Utility: System and method for measurement of alignment Filling date: 9 Sep 2025 Issue date: 15 Feb 2022 |
Grant | Utility: Stage apparatus, lithographic apparatus, control unit and method Filling date: 9 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Lithographic apparatus, an operating method and device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Inspection tool, lithographic apparatus, electron beam source and an inspection method Filling date: 9 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Measurement method and apparatus Filling date: 9 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Radiation source Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Metrology tools comprising aplanatic objective singlet Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Showing 100 to 150 of 666 patents.