ASML Holding N.V.
Utility Patents
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Methods and apparatus for measuring a property of a substrate Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Methods and apparatus for metrology Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Metrology method, patterning device, apparatus and computer program Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Method and system for increasing accuracy of pattern positioning Filling date: 9 Sep 2025 Issue date: 4 May 2021 |
Grant | Utility: Method and system for the removal and/or avoidance of contamination in charged particle beam systems Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Metrology apparatus with radiation source having multiple broadband outputs Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Patterning device cooling apparatus Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Binarization method and freeform mask optimization flow Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Metrology parameter determination and metrology recipe selection Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Computational metrology Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Debris mitigation system, radiation source and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Pellicle and pellicle assembly Filling date: 9 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Method and apparatus for measuring a parameter of interest using image plane detection techniques Filling date: 9 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus Filling date: 9 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Selection of substrate measurement recipes Filling date: 9 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Lithographic apparatus Filling date: 9 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Optical detector Filling date: 9 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Sensor mark and a method of manufacturing a sensor mark Filling date: 9 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Method and device for irradiating spots on a layer Filling date: 9 Sep 2025 Issue date: 13 Apr 2021 |
Grant | Utility: Radiation source with temperature-controlled hollow fiber and a method for use in metrology applications Filling date: 9 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: Pellicle attachment apparatus Filling date: 9 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: Fluid handling structure and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 6 Apr 2021 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: Lithographic method Filling date: 9 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method Filling date: 9 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: Selection of measurement locations for patterning processes Filling date: 9 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Filling date: 9 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: Substrate table, a lithographic apparatus and a device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Optimization of assist features and source Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Method and apparatus for angular-resolved spectroscopic lithography characterization Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Method of determining a parameter of a pattern transfer process, device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Method of measuring a target, metrology apparatus, lithographic cell, and target Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Lithographic apparatus, lithographic projection apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Guiding device and associated system Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Information determining apparatus and method Filling date: 9 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Lithographic method and apparatus Filling date: 9 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Methods of determining process models by machine learning Filling date: 9 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures Filling date: 9 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Method for removing photosensitive material on a substrate Filling date: 9 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Laser-driven photon source and inspection apparatus including such a laser-driven photon source Filling date: 9 Sep 2025 Issue date: 16 Mar 2021 |
Grant | Utility: Alignment measurement system Filling date: 9 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: System for evacuating a chamber Filling date: 9 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Mark position determination method Filling date: 9 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Topography measurement system Filling date: 9 Sep 2025 Issue date: 2 Mar 2021 |
Grant | Utility: Lithographic apparatus Filling date: 9 Sep 2025 Issue date: 2 Mar 2021 |
Showing 350 to 400 of 666 patents.