| Utility: Designer atomic layer etching Filling date: 13 Sep 2025 Issue date: 1 Feb 2022 | 17 Dec 2019 | 1 Feb 2022 |
| Utility: Multi zone substrate support for ALD film property correction and tunability Filling date: 13 Sep 2025 Issue date: 1 Feb 2022 | 15 Nov 2018 | 1 Feb 2022 |
| Utility: Electrostatic chucking pedestal with substrate backside purging and thermal sinking Filling date: 13 Sep 2025 Issue date: 25 Jan 2022 | 1 Feb 2018 | 25 Jan 2022 |
| Utility: Control of current density in an electroplating apparatus Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 | 19 May 2020 | 18 Jan 2022 |
| Utility: Electrochemical doping of thin metal layers employing underpotential deposition and thermal treatment Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 | 31 Oct 2019 | 18 Jan 2022 |
| Utility: Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 | 25 Feb 2019 | 18 Jan 2022 |
| Utility: 3D printed plasma arrestor for an electrostatic chuck Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 | 18 Feb 2016 | 18 Jan 2022 |
| Utility: Matchless plasma source for semiconductor wafer fabrication Filling date: 13 Sep 2025 Issue date: 11 Jan 2022 | 20 Apr 2020 | 11 Jan 2022 |
| Utility: Removing bubbles from plating cell Filling date: 13 Sep 2025 Issue date: 4 Jan 2022 | 8 May 2020 | 4 Jan 2022 |
| Utility: Atomic layer deposition and etch in a single plasma chamber for critical dimension control Filling date: 13 Sep 2025 Issue date: 28 Dec 2021 | 25 Jun 2020 | 28 Dec 2021 |
| Utility: Vacuum-integrated hardmask processes and apparatus Filling date: 13 Sep 2025 Issue date: 28 Dec 2021 | 21 Nov 2019 | 28 Dec 2021 |
| Utility: Monitoring surface oxide on seed layers during electroplating Filling date: 13 Sep 2025 Issue date: 28 Dec 2021 | 6 Sep 2019 | 28 Dec 2021 |
| Utility: Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators Filling date: 13 Sep 2025 Issue date: 7 Dec 2021 | 15 Apr 2019 | 7 Dec 2021 |
| Utility: Tin oxide thin film spacers in semiconductor device manufacturing Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 | 20 Mar 2020 | 23 Nov 2021 |
| Utility: Control of wafer bow in multiple stations Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 | 16 Dec 2019 | 23 Nov 2021 |
| Utility: Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 | 30 Jul 2019 | 23 Nov 2021 |
| Utility: Dynamic precursor dosing for atomic layer deposition Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 | 20 Sep 2018 | 23 Nov 2021 |
| Utility: Progressive heating of components of substrate processing systems using TCR element-based heaters Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 | 8 Aug 2018 | 23 Nov 2021 |
| Utility: RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 | 2 Aug 2018 | 23 Nov 2021 |
| Utility: Atomic layer deposition and etch for reducing roughness Filling date: 13 Sep 2025 Issue date: 9 Nov 2021 | 10 Apr 2020 | 9 Nov 2021 |
| Utility: Copper electrodeposition on cobalt lined features Filling date: 13 Sep 2025 Issue date: 9 Nov 2021 | 6 Feb 2020 | 9 Nov 2021 |
| Utility: Method for etching an etch layer Filling date: 13 Sep 2025 Issue date: 9 Nov 2021 | 21 Aug 2018 | 9 Nov 2021 |
| Utility: Internal plasma grid for semiconductor fabrication Filling date: 13 Sep 2025 Issue date: 9 Nov 2021 | 17 Nov 2015 | 9 Nov 2021 |
| Utility: Gapfill of variable aspect ratio features with a composite PEALD and PECVD method Filling date: 13 Sep 2025 Issue date: 28 Sep 2021 | 31 May 2019 | 28 Sep 2021 |
| Utility: Apparatus for thermal control of tubing assembly and associated methods Filling date: 13 Sep 2025 Issue date: 28 Sep 2021 | 21 Nov 2018 | 28 Sep 2021 |
| Utility: Ceramic baseplate with channels having non-square corners Filling date: 13 Sep 2025 Issue date: 28 Sep 2021 | 22 Aug 2018 | 28 Sep 2021 |
| Utility: Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Filling date: 13 Sep 2025 Issue date: 21 Sep 2021 | 4 May 2020 | 21 Sep 2021 |
| Utility: Peripheral RF feed and symmetric RF return for symmetric RF delivery Filling date: 13 Sep 2025 Issue date: 21 Sep 2021 | 23 Jan 2020 | 21 Sep 2021 |
| Utility: Split chamber assembly Filling date: 13 Sep 2025 Issue date: 21 Sep 2021 | 4 Jan 2019 | 21 Sep 2021 |
| Utility: Method to selectively pattern a surface for plasma resistant coat applications Filling date: 13 Sep 2025 Issue date: 21 Sep 2021 | 30 Jan 2018 | 21 Sep 2021 |
| Utility: Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region Filling date: 13 Sep 2025 Issue date: 7 Sep 2021 | 13 May 2019 | 7 Sep 2021 |
| Utility: Systems for removing and replacing consumable parts from a semiconductor process module in situ Filling date: 13 Sep 2025 Issue date: 7 Sep 2021 | 2 Aug 2017 | 7 Sep 2021 |
| Utility: Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Filling date: 13 Sep 2025 Issue date: 24 Aug 2021 | 16 Mar 2020 | 24 Aug 2021 |
| Utility: Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods Filling date: 13 Sep 2025 Issue date: 24 Aug 2021 | 2 Oct 2019 | 24 Aug 2021 |
| Utility: Ultrathin atomic layer deposition film accuracy thickness control Filling date: 13 Sep 2025 Issue date: 24 Aug 2021 | 28 Jun 2019 | 24 Aug 2021 |
| Utility: Real-time control of temperature in a plasma chamber Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 | 20 Jul 2018 | 10 Aug 2021 |
| Utility: Protective coating for electrostatic chucks Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 | 20 Mar 2018 | 10 Aug 2021 |
| Utility: Quartz component with protective coating Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 | 2 Mar 2018 | 10 Aug 2021 |
| Utility: Method to create air gaps Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 | 9 Feb 2018 | 10 Aug 2021 |
| Utility: Process for optimizing cobalt electrofill using sacrificial oxidants Filling date: 13 Sep 2025 Issue date: 3 Aug 2021 | 13 May 2019 | 3 Aug 2021 |
| Utility: Azimuthal critical dimension non-uniformity for double patterning process Filling date: 13 Sep 2025 Issue date: 3 Aug 2021 | 29 Jun 2018 | 3 Aug 2021 |
| Utility: Suppressing interfacial reactions by varying the wafer temperature throughout deposition Filling date: 13 Sep 2025 Issue date: 27 Jul 2021 | 3 Jul 2019 | 27 Jul 2021 |
| Utility: Fill on demand ampoule refill Filling date: 13 Sep 2025 Issue date: 27 Jul 2021 | 22 May 2015 | 27 Jul 2021 |
