MKS Instruments
Utility Patents

Last updated:

List of all MKS Instruments patents 58 in total

Status Patent
Grant
Utility: Robust ion source External link
Filling date: 9 Sep 2025 Issue date: 21 Jan 2020
Grant
Utility: Balancing RF circuit and control for a cross-coupled SIMO distribution network External link
Filling date: 9 Sep 2025 Issue date: 14 Jan 2020
Grant
Utility: Method and apparatus for deposition cleaning in a pumping line External link
Filling date: 9 Sep 2025 Issue date: 14 Jan 2020
Grant
Utility: Method and apparatus for pressure-based flow measurement in non-critical flow conditions External link
Filling date: 9 Sep 2025 Issue date: 24 Dec 2019
Grant
Utility: Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system External link
Filling date: 9 Sep 2025 Issue date: 10 Dec 2019
Grant
Utility: Pressure sensor with real time health monitoring and compensation External link
Filling date: 9 Sep 2025 Issue date: 29 Oct 2019
Grant
Utility: Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber External link
Filling date: 9 Sep 2025 Issue date: 27 Aug 2019
Grant
Utility: Feedback control by RF waveform tailoring for ion energy distribution External link
Filling date: 9 Sep 2025 Issue date: 27 Aug 2019

Showing 50 to 58 of 58 patents.