| Utility: Polymer composite vacuum components Filling date: 8 Sep 2025 Issue date: 21 Jun 2022 | 11 Dec 2020 | 21 Jun 2022 |
| Utility: Method and apparatus for deposition cleaning in a pumping line Filling date: 8 Sep 2025 Issue date: 21 Jun 2022 | 30 Nov 2020 | 21 Jun 2022 |
| Utility: Adaptive periodic waveform controller Filling date: 8 Sep 2025 Issue date: 21 Jun 2022 | 18 Jun 2020 | 21 Jun 2022 |
| Utility: Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications Filling date: 8 Sep 2025 Issue date: 26 Apr 2022 | 6 Aug 2020 | 26 Apr 2022 |
| Utility: Capacitance manometer with improved baffle for improved detection accuracy Filling date: 8 Sep 2025 Issue date: 29 Mar 2022 | 20 Mar 2020 | 29 Mar 2022 |
| Utility: Microwave magnetron with constant anodic impedance and systems using the same Filling date: 8 Sep 2025 Issue date: 22 Feb 2022 | 4 Oct 2019 | 22 Feb 2022 |
| Utility: Intermodulation distortion mitigation using electronic variable capacitor Filling date: 8 Sep 2025 Issue date: 25 Jan 2022 | 19 Oct 2020 | 25 Jan 2022 |
| Utility: Microwave applicator with solid-state generator power source Filling date: 8 Sep 2025 Issue date: 11 Jan 2022 | 14 Aug 2020 | 11 Jan 2022 |
| Utility: Methods and apparatus for pressure based mass flow ratio control Filling date: 8 Sep 2025 Issue date: 30 Nov 2021 | 25 Feb 2020 | 30 Nov 2021 |
| Utility: High speed synchronization of plasma source/bias power delivery Filling date: 8 Sep 2025 Issue date: 26 Oct 2021 | 26 Jun 2019 | 26 Oct 2021 |
| Utility: Radical output monitor for a remote plasma source and method of use Filling date: 8 Sep 2025 Issue date: 7 Sep 2021 | 12 Jun 2019 | 7 Sep 2021 |
| Utility: Cooling and compression clamp for short lead power devices Filling date: 8 Sep 2025 Issue date: 27 Jul 2021 | 29 Aug 2018 | 27 Jul 2021 |
| Utility: Actively cooled vacuum isolation valve Filling date: 8 Sep 2025 Issue date: 6 Jul 2021 | 10 May 2019 | 6 Jul 2021 |
| Utility: Adaptive control for a power generator Filling date: 8 Sep 2025 Issue date: 22 Jun 2021 | 11 Mar 2019 | 22 Jun 2021 |
| Utility: Method and apparatus for deposition cleaning in a pumping line Filling date: 8 Sep 2025 Issue date: 1 Jun 2021 | 11 Nov 2019 | 1 Jun 2021 |
| Utility: Plasma source having a dielectric plasma chamber with improved plasma resistance Filling date: 8 Sep 2025 Issue date: 25 May 2021 | 13 Jul 2018 | 25 May 2021 |
| Utility: Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber Filling date: 8 Sep 2025 Issue date: 18 May 2021 | 9 Jul 2019 | 18 May 2021 |
| Utility: Method for ion mass separation and ion energy control in process plasmas Filling date: 8 Sep 2025 Issue date: 4 May 2021 | 8 Apr 2019 | 4 May 2021 |
| Utility: System for and method of fast pulse gas delivery Filling date: 8 Sep 2025 Issue date: 6 Apr 2021 | 23 Oct 2018 | 6 Apr 2021 |
| Utility: Anode electrode shield for inverted magnetron cold cathode ionization gauge Filling date: 8 Sep 2025 Issue date: 6 Apr 2021 | 7 Dec 2017 | 6 Apr 2021 |
| Utility: Gas analyzer system with ion source Filling date: 8 Sep 2025 Issue date: 16 Mar 2021 | 27 Nov 2019 | 16 Mar 2021 |
| Utility: Method and apparatus for processing dielectric materials using microwave energy Filling date: 8 Sep 2025 Issue date: 9 Mar 2021 | 10 Aug 2018 | 9 Mar 2021 |
| Utility: Pulsed, bidirectional radio frequency source/load Filling date: 8 Sep 2025 Issue date: 23 Feb 2021 | 11 Dec 2019 | 23 Feb 2021 |
| Utility: Gas analysis with an inverted magnetron source Filling date: 8 Sep 2025 Issue date: 23 Feb 2021 | 29 Apr 2019 | 23 Feb 2021 |
| Utility: Toroidal plasma channel with varying cross-section areas along the channel Filling date: 8 Sep 2025 Issue date: 23 Feb 2021 | 10 Jul 2017 | 23 Feb 2021 |
| Utility: Method and apparatus for partial pressure detection Filling date: 8 Sep 2025 Issue date: 9 Feb 2021 | 9 May 2018 | 9 Feb 2021 |
| Utility: Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system Filling date: 8 Sep 2025 Issue date: 2 Feb 2021 | 13 Nov 2019 | 2 Feb 2021 |
| Utility: Impedance matching network model based correction scheme and performance repeatability Filling date: 8 Sep 2025 Issue date: 2 Feb 2021 | 19 Oct 2018 | 2 Feb 2021 |
| Utility: Robust ion source Filling date: 8 Sep 2025 Issue date: 12 Jan 2021 | 13 Dec 2019 | 12 Jan 2021 |
| Utility: Polymer composite vacuum components Filling date: 8 Sep 2025 Issue date: 29 Dec 2020 | 17 May 2019 | 29 Dec 2020 |
| Utility: Thermal conductivity gauge Filling date: 8 Sep 2025 Issue date: 24 Nov 2020 | 17 Apr 2018 | 24 Nov 2020 |
| Utility: Pulse synchronization by monitoring power in another frequency band Filling date: 8 Sep 2025 Issue date: 3 Nov 2020 | 15 Mar 2013 | 3 Nov 2020 |
| Utility: Method and apparatus for self verification of pressured based mass flow controllers Filling date: 8 Sep 2025 Issue date: 13 Oct 2020 | 27 Jun 2018 | 13 Oct 2020 |
| Utility: Microwave applicator with solid-state generator power source Filling date: 8 Sep 2025 Issue date: 29 Sep 2020 | 16 Mar 2017 | 29 Sep 2020 |
| Utility: Apparatus and method for thermal insulation of high-temperature pressure sensors Filling date: 8 Sep 2025 Issue date: 22 Sep 2020 | 27 Jun 2018 | 22 Sep 2020 |
| Utility: Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein Filling date: 8 Sep 2025 Issue date: 15 Sep 2020 | 9 Nov 2017 | 15 Sep 2020 |
| Utility: Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching Filling date: 8 Sep 2025 Issue date: 11 Aug 2020 | 8 Oct 2019 | 11 Aug 2020 |
| Utility: Adaptive periodic waveform controller Filling date: 8 Sep 2025 Issue date: 28 Jul 2020 | 12 Feb 2019 | 28 Jul 2020 |
| Utility: Method and apparatus for pulse gas delivery using an external pressure trigger Filling date: 8 Sep 2025 Issue date: 28 Jul 2020 | 7 Sep 2018 | 28 Jul 2020 |
| Utility: Methods and apparatus for multiple channel mass flow and ratio control systems Filling date: 8 Sep 2025 Issue date: 30 Jun 2020 | 7 May 2018 | 30 Jun 2020 |
| Utility: Feedback control by RF waveform tailoring for ion energy distribution Filling date: 8 Sep 2025 Issue date: 23 Jun 2020 | 11 Jul 2019 | 23 Jun 2020 |
| Utility: Supervisory control of radio frequency (RF) impedance tuning operation Filling date: 8 Sep 2025 Issue date: 26 May 2020 | 19 Dec 2017 | 26 May 2020 |
| Utility: Method and apparatus for pulse gas delivery with isolation valves Filling date: 8 Sep 2025 Issue date: 12 May 2020 | 2 Feb 2018 | 12 May 2020 |
| Utility: Sputtering system and method including an arc detection Filling date: 8 Sep 2025 Issue date: 31 Mar 2020 | 8 Mar 2017 | 31 Mar 2020 |
| Utility: System for and method of monitoring flow through mass flow controllers in real time Filling date: 8 Sep 2025 Issue date: 31 Mar 2020 | 30 Jan 2017 | 31 Mar 2020 |
| Utility: Resonant transmission line to deliver precision RF voltage Filling date: 8 Sep 2025 Issue date: 24 Mar 2020 | 15 Nov 2018 | 24 Mar 2020 |
| Utility: Predictive diagnostics systems and methods using vacuum pressure control valves Filling date: 8 Sep 2025 Issue date: 11 Feb 2020 | 28 Apr 2017 | 11 Feb 2020 |
| Utility: Polygonal toroidal plasma source Filling date: 8 Sep 2025 Issue date: 4 Feb 2020 | 8 May 2019 | 4 Feb 2020 |
| Utility: Power converter control apparatus and method for high stability and power factor improvement in the presence of high source impedances Filling date: 8 Sep 2025 Issue date: 28 Jan 2020 | 30 Jan 2019 | 28 Jan 2020 |
| Utility: Pulsed, bidirectional radio frequency source/load Filling date: 8 Sep 2025 Issue date: 28 Jan 2020 | 9 May 2018 | 28 Jan 2020 |
