MKS Instruments
Utility Patent Applications
Last updated:
List of all MKS Instruments patents 60 in total
| Status | Patent |
|---|---|
Application | Utility: Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation Energy Filling date: 8 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: Load-Lock Gauge Filling date: 8 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived Molecules and Method of Use Filling date: 8 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: Monitoring Radical Particle Concentration Using Mass Spectrometry Filling date: 8 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: Switched Capacitor Modulator Filling date: 8 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery with Pressure Control Filling date: 8 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances Filling date: 8 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: Thermal Conductivity Gauge Filling date: 8 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: Pressure Control Using An External Trigger Filling date: 8 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: Intermodulation Distortion Mitigation Using Electronic Variable Capacitor Filling date: 8 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: Endpoint Detection of Deposition Cleaning in a Pumping Line and a Processing Chamber Filling date: 8 Sep 2025 Issue date: 17 Feb 2022 |
Application | Utility: High Speed Synchronization Of Plasma Source/Bias Power Delivery Filling date: 8 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: System and Method for Arc Detection Using a Bias RF Generator Signal Filling date: 8 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: Valve Apparatuses and Related Methods for Reactive Process Gas Isolation and Facilitating Purge During Isolation Filling date: 8 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: Adaptive Control For A Power Generator Filling date: 8 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: Capacitance Manometer Filling date: 8 Sep 2025 Issue date: 23 Sep 2021 |
Application | Utility: Cooling And Compression Clamp For Short Lead Power Devices Filling date: 8 Sep 2025 Issue date: 2 Sep 2021 |
Application | Utility: Methods and Apparatus for Pressure Based Mass Flow Ratio Control Filling date: 8 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance Filling date: 8 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery with Concentration Measurement Filling date: 8 Sep 2025 Issue date: 15 Jul 2021 |
Application | Utility: Thermal Conductivity Gauge Filling date: 8 Sep 2025 Issue date: 8 Jul 2021 |
Application | Utility: Intermodulation Distortion Mitigation Using Electronic Variable Capacitor Filling date: 8 Sep 2025 Issue date: 22 Apr 2021 |
Application | Utility: MICROWAVE MAGNETRON WITH CONSTANT ANODIC IMPEDANCE AND SYSTEMS USING THE SAME Filling date: 8 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: Polymer Composite Vacuum Components Filling date: 8 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: Method and Apparatus for Deposition Cleaning in a Pumping Line Filling date: 8 Sep 2025 Issue date: 18 Mar 2021 |
Application | Utility: Method And Apparatus To Enhance Sheath Formation, Evolution And Pulse To Pulse Stability In RF Powered Plasma Applications Filling date: 8 Sep 2025 Issue date: 18 Feb 2021 |
Application | Utility: Adaptive Periodic Waveform Controller Filling date: 8 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: Nano-Textured Attenuator for Use with Laser Beam Profiling and Laser Beam Characterization Systems and Method of Use Filling date: 8 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: Systems and Methods for Generating a Conductive Liquid Comprising Deionized Water with Ammonia Gas Dissolved Therein Filling date: 8 Sep 2025 Issue date: 17 Dec 2020 |
Application | Utility: SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES Filling date: 8 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES Filling date: 8 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: Systems and Methods for Generating a Dissolved Ammonia Solution with Reduced Dissolved Carrier Gas and Oxygen Content Filling date: 8 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery Filling date: 8 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: Low Profile Heater Apparatus and Method of Manufacture Filling date: 8 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger Filling date: 8 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: Pulsed, Bidirectional Radio Frequency Source/Load Filling date: 8 Sep 2025 Issue date: 7 May 2020 |
Application | Utility: PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 |
Application | Utility: Impedance Matching Network Model Based Correction Scheme and Performance Repeatability Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 |
Application | Utility: Robust Ion Source Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 |
Application | Utility: APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM Filling date: 8 Sep 2025 Issue date: 26 Mar 2020 |
Application | Utility: Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger Filling date: 8 Sep 2025 Issue date: 12 Mar 2020 |
Application | Utility: Method and Apparatus for Deposition Cleaning in a Pumping Line Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: Ozonated Water Delivery System and Method of Use Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: Apparatus and Method for Thermal Insulation of High-Temperature Pressure Sensors Filling date: 8 Sep 2025 Issue date: 2 Jan 2020 |
Application | Utility: Adaptive Control For A Power Generator Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: Radical Output Monitor for a Remote Plasma Source and Method of Use Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: Gas Analysis with an Inverted Magnetron Source Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Showing 1 to 50 of 60 patents.