| Utility: Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 | 10 Oct 2018 | 20 Apr 2021 |
| Utility: Integrated elastomeric lipseal and cup bottom for reducing wafer sticking Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 | 2 Aug 2018 | 20 Apr 2021 |
| Utility: Sensor and adjuster for a consumable Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 | 6 Nov 2015 | 20 Apr 2021 |
| Utility: Fill process optimization using feature scale modeling Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 | 29 Jan 2019 | 13 Apr 2021 |
| Utility: Substrate holder having integrated temperature measurement electrical devices Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 | 14 Jan 2019 | 13 Apr 2021 |
| Utility: One-piece anode for tuning electroplating at an edge of a substrate Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 | 30 Nov 2018 | 13 Apr 2021 |
| Utility: Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film Filling date: 6 Sep 2025 Issue date: 13 Apr 2021 | 8 May 2018 | 13 Apr 2021 |
| Utility: Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 | 11 Jul 2019 | 6 Apr 2021 |
| Utility: Auto-calibrated process independent feedforward control for processing substrates Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 | 13 Sep 2018 | 6 Apr 2021 |
| Utility: High flow multi-way piston valve for deposition systems Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 | 30 May 2018 | 6 Apr 2021 |
| Utility: Conditioning chamber component Filling date: 6 Sep 2025 Issue date: 6 Apr 2021 | 2 May 2018 | 6 Apr 2021 |
| Utility: Apparatus including metallized-ceramic tubes for radio-frequency and gas delivery Filling date: 6 Sep 2025 Issue date: 30 Mar 2021 | 20 Aug 2019 | 30 Mar 2021 |
| Utility: Electrode for plasma processing chamber Filling date: 6 Sep 2025 Issue date: 30 Mar 2021 | 17 Oct 2017 | 30 Mar 2021 |
| Utility: Apparatus and method for deposition and etch in gap fill Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 | 26 Jun 2019 | 23 Mar 2021 |
| Utility: Long-life high-power terminals for substrate support with embedded heating elements Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 | 20 Sep 2018 | 23 Mar 2021 |
| Utility: Image based plasma sheath profile detection on plasma processing tools Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 | 29 May 2018 | 23 Mar 2021 |
| Utility: Methods and apparatuses for electroplating nickel using sulfur-free nickel anodes Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 | 3 Jul 2017 | 23 Mar 2021 |
| Utility: Gas delivery system Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 | 19 Nov 2015 | 23 Mar 2021 |
| Utility: Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 4 Aug 2017 | 16 Mar 2021 |
| Utility: Using modeling for identifying a location of a fault in an RF transmission system for a plasma system Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 | 21 Apr 2014 | 16 Mar 2021 |
| Utility: Electrostatic chuck filter box and mounting bracket Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 19 Jun 2020 | 9 Mar 2021 |
| Utility: Rotary friction welded blank for PECVD heated showerhead Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 18 Mar 2019 | 9 Mar 2021 |
| Utility: Gas distributor and flow verifier Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 19 Jul 2018 | 9 Mar 2021 |
| Utility: Methods and systems for advanced ion control for etching processes Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 | 21 Nov 2017 | 9 Mar 2021 |
| Utility: Tunable upper plasma-exclusion-zone ring for a bevel etcher Filling date: 6 Sep 2025 Issue date: 2 Mar 2021 | 4 Oct 2013 | 2 Mar 2021 |
| Utility: Controlling plating electrolyte concentration on an electrochemical plating apparatus Filling date: 6 Sep 2025 Issue date: 23 Feb 2021 | 1 Nov 2018 | 23 Feb 2021 |
| Utility: Apparatus with optical cavity for determining process rate Filling date: 6 Sep 2025 Issue date: 23 Feb 2021 | 24 May 2018 | 23 Feb 2021 |
| Utility: Copper electrodeposition sequence for the filling of cobalt lined features Filling date: 6 Sep 2025 Issue date: 23 Feb 2021 | 30 Mar 2018 | 23 Feb 2021 |
| Utility: Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 1 Jun 2018 | 16 Feb 2021 |
| Utility: Electrostatically clamped edge ring Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 12 Feb 2018 | 16 Feb 2021 |
| Utility: Articulated direct-mount inductor and associated systems and methods Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 14 Jun 2017 | 16 Feb 2021 |
| Utility: Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 15 Feb 2017 | 16 Feb 2021 |
| Utility: Carrier plate for use in plasma processing systems Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 | 3 Nov 2016 | 16 Feb 2021 |
| Utility: Feature fill with multi-stage nucleation inhibition Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 | 10 Feb 2020 | 9 Feb 2021 |
| Utility: Monolithic gas distribution manifold and various construction techniques and use cases therefor Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 | 23 Dec 2019 | 9 Feb 2021 |
| Utility: Active control of radial etch uniformity Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 | 18 Jun 2018 | 9 Feb 2021 |
| Utility: Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power Filling date: 6 Sep 2025 Issue date: 2 Feb 2021 | 31 Oct 2019 | 2 Feb 2021 |
| Utility: Substrate support with improved process uniformity Filling date: 6 Sep 2025 Issue date: 2 Feb 2021 | 5 Jan 2017 | 2 Feb 2021 |
| Utility: Selective deposition of silicon oxide Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 | 16 Mar 2020 | 26 Jan 2021 |
| Utility: Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 | 10 Dec 2018 | 26 Jan 2021 |
| Utility: Asymmetric wafer bow compensation by chemical vapor deposition Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 | 28 Sep 2018 | 26 Jan 2021 |
| Utility: Substrate processing chamber with showerhead having cooled faceplate Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 | 12 Jun 2018 | 26 Jan 2021 |
| Utility: Halogen removal module and associated systems and methods Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 | 12 May 2017 | 26 Jan 2021 |
| Utility: Ceramic foam for helium light-up suppression Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 | 1 Oct 2018 | 19 Jan 2021 |
| Utility: Asymmetric wafer bow compensation by physical vapor deposition Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 | 28 Sep 2018 | 19 Jan 2021 |
| Utility: In-situ chamber clean end point detection systems and methods using computer vision systems Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 | 24 Sep 2018 | 19 Jan 2021 |
| Utility: Maintenance mode power supply system Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 | 25 Jul 2018 | 19 Jan 2021 |
| Utility: Edge seal configurations for a lower electrode assembly Filling date: 6 Sep 2025 Issue date: 12 Jan 2021 | 29 Aug 2018 | 12 Jan 2021 |
| Utility: Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods Filling date: 6 Sep 2025 Issue date: 12 Jan 2021 | 29 Aug 2017 | 12 Jan 2021 |
| Utility: Flow through line charge volume Filling date: 6 Sep 2025 Issue date: 29 Dec 2020 | 19 Dec 2019 | 29 Dec 2020 |
