Lam Research
Design Patents
Last updated:
List of all Lam Research patents 3 in total
| Status | Patent |
|---|---|
Grant | Design: Semiconductor wafer processing apparatus Filling date: 7 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Design: Cooling plate for a semiconductor processing apparatus Filling date: 7 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Design: High density hole pattern dual plenum hole showerhead assembly Filling date: 7 Sep 2025 Issue date: 12 Apr 2022 |
Showing 1 to 3 of 3 patents.