Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 402 in total
| Status | Patent |
|---|---|
Application | Utility: CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM Filling date: 7 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES Filling date: 7 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL Filling date: 7 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICONDUCTOR SUBSTRATE PROCESSING Filling date: 7 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS Filling date: 7 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: AUTOMATED TRANSFER OF EDGE RING REQUIRING ROTATIONAL ALIGNMENT Filling date: 7 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLASMA EXPOSURE FOR GAPFILL Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLASMA EXPOSURE FOR GAPFILL Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: THERMOELECTRIC COOLING PEDESTAL FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SELECTIVE CARBON DEPOSITION Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: REDUCED DIAMETER CARRIER RING HARDWARE FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: IN-SITU CONTROL OF FILM PROPERTIES DURING ATOMIC LAYER DEPOSITION Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: RF IMMUNE SENSOR PROBE FOR MONITORING A TEMPERATURE OF AN ELECTROSTATIC CHUCK OF A SUBSTRATE PROCESSING SYSTEM Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SYSTEMS AND METHODS FOR COMPENSATING FOR RF POWER LOSS Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SixNy AS A NUCLEATION LAYER FOR SiCxOy Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: SHOWERHEAD INSERT FOR UNIFORMITY TUNING Filling date: 7 Sep 2025 Issue date: 28 Jul 2022 |
Application | Utility: ELECTROCHEMICAL DEPOSITION SYSTEM INCLUDING OPTICAL PROBES Filling date: 7 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: VARIABLE INDUCTOR DEVICE Filling date: 7 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: VOLTAGE AND CURRENT PROBE Filling date: 7 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM Filling date: 7 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEMPERATURE TRANSIENTS OF MULTI-ZONE SUBSTRATE SUPPORTS Filling date: 7 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIGHT-UP/ARCING Filling date: 7 Sep 2025 Issue date: 14 Jul 2022 |
Application | Utility: HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON HARDMASKS BY HIGH POWER PULSED LOW FREQUENCY RF Filling date: 7 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: ATOMIC LAYER ETCH AND SELECTIVE DEPOSITION PROCESS FOR EXTREME ULTRAVIOLET LITHOGRAPHY RESIST IMPROVEMENT Filling date: 7 Sep 2025 Issue date: 7 Jul 2022 |
Application | Utility: ALTERNATING ETCH AND PASSIVATION PROCESS Filling date: 7 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRATE SUPPORT FOR MULTI-PATTERNING PROCESSES Filling date: 7 Sep 2025 Issue date: 30 Jun 2022 |
Application | Utility: ATOMIC LAYER ETCHING FOR SUBTRACTIVE METAL ETCH Filling date: 7 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: MODULAR-COMPONENT SYSTEM FOR GAS DELIVERY Filling date: 7 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: ELECTROSTATIC CHUCK WITH SPATIALLY TUNABLE RF COUPLING TO A WAFER Filling date: 7 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: CARBON BASED DEPOSITIONS USED FOR CRITICAL DIMENSION CONTROL DURING HIGH ASPECT RATIO FEATURE ETCHES AND FOR FORMING PROTECTIVE LAYERS Filling date: 7 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: SURFACE COATING TREATMENT Filling date: 7 Sep 2025 Issue date: 16 Jun 2022 |
Application | Utility: EARLY WARNING SYSTEMS AND METHODS FOR DETERMINING CAPACITOR FAILURES Filling date: 7 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAMBERS Filling date: 7 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: ELECTROSTATIC CHUCK HEATER RESISTANCE MEASUREMENT TO APPROXIMATE TEMPERATURE Filling date: 7 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS Filling date: 7 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: TUNGSTEN FEATURE FILL WITH INHIBITION CONTROL Filling date: 7 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: SYSTEMS AND METHODS FOR TUNING A MHZ RF GENERATOR WITHIN A CYCLE OF OPERATION OF A KHZ RF GENERATOR Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PROCESS COOLING-WATER ISOLATION Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: METHOD FOR PROVIDING DOPED SILICON Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION (ALD) SUBSTRATE PROCESSING CHAMBERS Filling date: 7 Sep 2025 Issue date: 26 May 2022 |
Application | Utility: COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS MULTIPLE PLASMA PROCESSING STATIONS Filling date: 7 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: MUTUALLY INDUCED FILTERS Filling date: 7 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTERIUM PLASMA Filling date: 7 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: SHOWERHEAD WITH CONFIGURABLE GAS OUTLETS Filling date: 7 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: ELECTROSTATIC CHUCK WITH POWDER COATING Filling date: 7 Sep 2025 Issue date: 28 Apr 2022 |
Showing 1 to 50 of 402 patents.