| Utility: Plasma assisted doping on germanium Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 23 Sep 2019 | 14 Jul 2020 |
| Utility: Uniform flow behavior in an electroplating cell Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 16 Mar 2018 | 14 Jul 2020 |
| Utility: Removal of electroplating bath additives Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 12 Feb 2018 | 14 Jul 2020 |
| Utility: Radiofrequency (RF) filter for multi-frequency RF bias Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 6 Oct 2017 | 14 Jul 2020 |
| Utility: Systems and methods for achieving uniformity across a redistribution layer Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 14 Mar 2017 | 14 Jul 2020 |
| Utility: Self limiting lateral atomic layer etch Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 1 Mar 2017 | 14 Jul 2020 |
| Utility: Method to recess cobalt for gate metal application Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 30 Aug 2019 | 7 Jul 2020 |
| Utility: Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 8 Aug 2018 | 7 Jul 2020 |
| Utility: Using modeling to determine ion energy associated with a plasma system Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 9 Nov 2017 | 7 Jul 2020 |
| Utility: End effector assembly for clean/dirty substrate handling Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 29 Aug 2017 | 7 Jul 2020 |
| Utility: Matched TCR joule heater designs for electrostatic chucks Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 13 Oct 2016 | 7 Jul 2020 |
| Utility: Wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 15 Jul 2019 | 30 Jun 2020 |
| Utility: Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 7 Aug 2018 | 30 Jun 2020 |
| Utility: Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 16 Oct 2017 | 30 Jun 2020 |
| Utility: Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 9 Feb 2017 | 30 Jun 2020 |
| Utility: Minimization of carbon loss in ALD SiO2 deposition on hardmask films Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 1 Jul 2019 | 23 Jun 2020 |
| Utility: Control of current density in an electroplating apparatus Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 10 Jan 2019 | 23 Jun 2020 |
| Utility: Electro-oxidative metal removal in through mask interconnect fabrication Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 19 Jul 2018 | 23 Jun 2020 |
| Utility: Electrostatic chuck filter box and mounting bracket Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 17 May 2018 | 23 Jun 2020 |
| Utility: Air cooled faraday shield and methods for using the same Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 31 Jan 2018 | 23 Jun 2020 |
| Utility: Atomic layer etching methods and apparatus Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 20 Dec 2017 | 23 Jun 2020 |
| Utility: Identifying components associated with a fault in a plasma system Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 8 Dec 2017 | 23 Jun 2020 |
| Utility: Multi-plane heater for semiconductor substrate support Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 11 Dec 2015 | 23 Jun 2020 |
| Utility: RF antenna producing a uniform near-field Poynting vector Filling date: 6 Sep 2025 Issue date: 16 Jun 2020 | 15 Jul 2019 | 16 Jun 2020 |
| Utility: Etching substrates using ALE and selective deposition Filling date: 6 Sep 2025 Issue date: 16 Jun 2020 | 21 Mar 2019 | 16 Jun 2020 |
| Utility: Selective atomic layer deposition with post-dose treatment Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 12 Jul 2018 | 9 Jun 2020 |
| Utility: Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 15 Nov 2017 | 9 Jun 2020 |
| Utility: Isotropic atomic layer etch for silicon oxides using no activation Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 21 Jul 2016 | 9 Jun 2020 |
| Utility: Methods and apparatuses for electroplating and seed layer detection Filling date: 6 Sep 2025 Issue date: 2 Jun 2020 | 30 Jul 2019 | 2 Jun 2020 |
| Utility: Frequency tuning for a matchless plasma source Filling date: 6 Sep 2025 Issue date: 2 Jun 2020 | 14 Mar 2018 | 2 Jun 2020 |
| Utility: Chamber with vertical support stem for symmetric conductance and RF delivery Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 12 Aug 2019 | 26 May 2020 |
| Utility: RF generator for generating a modulated frequency or an inter-modulated frequency Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 17 May 2019 | 26 May 2020 |
| Utility: Method for selective deposition using a base-catalyzed inhibitor Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 2 Oct 2018 | 26 May 2020 |
| Utility: Multiple-output radiofrequency matching module and associated methods Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 24 Apr 2018 | 26 May 2020 |
| Utility: Deposition of Aluminum oxide etch stop layers Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 22 Nov 2017 | 26 May 2020 |
| Utility: Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 13 Sep 2017 | 26 May 2020 |
| Utility: Connections between laminated heater and heater voltage inputs Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 3 May 2017 | 26 May 2020 |
| Utility: Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 6 Mar 2019 | 19 May 2020 |
| Utility: Removing bubbles from plating cells Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 1 May 2018 | 19 May 2020 |
| Utility: Turbomolecular pump deposition control and particle management Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 15 Mar 2018 | 19 May 2020 |
| Utility: Atomic layer deposition and etch for reducing roughness Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 21 Nov 2017 | 19 May 2020 |
| Utility: Substrate pedestal module including backside gas delivery tube and method of making Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 28 Jul 2017 | 19 May 2020 |
| Utility: Conical wafer centering and holding device for semiconductor processing Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 20 Dec 2016 | 19 May 2020 |
| Utility: Silicon-based deposition for semiconductor processing Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 23 Aug 2016 | 19 May 2020 |
| Utility: Moveable edge coupling ring for edge process control during semiconductor wafer processing Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 6 May 2015 | 19 May 2020 |
| Utility: Systems and methods for tuning to reduce reflected power in multiple states Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 15 Aug 2019 | 12 May 2020 |
| Utility: Using identifiers to map edge ring part numbers onto slot numbers Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 30 Aug 2018 | 12 May 2020 |
| Utility: Auto-calibration to a station of a process module that spins a wafer Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 5 Jun 2018 | 12 May 2020 |
| Utility: Copper electrodeposition on cobalt lined features Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 30 Mar 2018 | 12 May 2020 |
| Utility: Cathode RF asymmetry detection probe for semiconductor RF plasma processing equipment Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 6 Oct 2017 | 12 May 2020 |
