| Utility: Variable depth edge ring for etch uniformity control Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 2 Feb 2017 | 12 May 2020 |
| Utility: Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 28 Jun 2016 | 12 May 2020 |
| Utility: Reducing backside deposition at wafer edge Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 19 Dec 2014 | 12 May 2020 |
| Utility: Pre-treatment method to improve selectivity in a selective deposition process Filling date: 6 Sep 2025 Issue date: 5 May 2020 | 6 Aug 2018 | 5 May 2020 |
| Utility: Selective electroless electrochemical atomic layer deposition in an aqueous solution without external voltage bias Filling date: 6 Sep 2025 Issue date: 5 May 2020 | 3 Aug 2018 | 5 May 2020 |
| Utility: Selective growth of metal-containing hardmask thin films Filling date: 6 Sep 2025 Issue date: 5 May 2020 | 28 Jun 2018 | 5 May 2020 |
| Utility: Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 29 Jul 2019 | 28 Apr 2020 |
| Utility: Matchless plasma source for semiconductor wafer fabrication Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 18 Mar 2019 | 28 Apr 2020 |
| Utility: Mutually induced filters Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 16 Jul 2018 | 28 Apr 2020 |
| Utility: Use of voltage and current measurements to control dual zone ceramic pedestals Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 7 May 2018 | 28 Apr 2020 |
| Utility: Method monitoring chamber drift Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 27 Feb 2018 | 28 Apr 2020 |
| Utility: System for coordinating pressure pulses and RF modulation in a small volume confined process reactor Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 19 Oct 2015 | 28 Apr 2020 |
| Utility: Apparatus for spatial and temporal control of temperature on a substrate Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 24 Jul 2014 | 28 Apr 2020 |
| Utility: Selective deposition of silicon oxide Filling date: 6 Sep 2025 Issue date: 21 Apr 2020 | 30 Nov 2018 | 21 Apr 2020 |
| Utility: Doped ALD films for semiconductor patterning applications Filling date: 6 Sep 2025 Issue date: 21 Apr 2020 | 28 Sep 2016 | 21 Apr 2020 |
| Utility: Adjustment of power and frequency based on three or more states Filling date: 6 Sep 2025 Issue date: 21 Apr 2020 | 26 Jul 2016 | 21 Apr 2020 |
| Utility: Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter Filling date: 6 Sep 2025 Issue date: 21 Apr 2020 | 11 Mar 2013 | 21 Apr 2020 |
| Utility: Systems and methods for tuning an impedance matching network in a step-wise fashion Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 | 9 May 2019 | 14 Apr 2020 |
| Utility: Combiner and distributor for adjusting impedances or power across multiple plasma processing stations Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 | 16 Jan 2019 | 14 Apr 2020 |
| Utility: Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 | 4 Sep 2018 | 14 Apr 2020 |
| Utility: Planar substrate edge contact with open volume equalization pathways and side containment Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 | 13 Feb 2017 | 14 Apr 2020 |
| Utility: Systems and methods for controlling a plasma edge region Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 | 24 Jun 2016 | 14 Apr 2020 |
| Utility: Adjustable side gas plenum for edge rate control in a downstream reactor Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 | 11 May 2016 | 14 Apr 2020 |
| Utility: Method to recess cobalt for gate metal application Filling date: 6 Sep 2025 Issue date: 7 Apr 2020 | 30 Aug 2019 | 7 Apr 2020 |
| Utility: Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Filling date: 6 Sep 2025 Issue date: 7 Apr 2020 | 19 Oct 2018 | 7 Apr 2020 |
| Utility: Selective deposition of SiN on horizontal surfaces Filling date: 6 Sep 2025 Issue date: 7 Apr 2020 | 1 Aug 2018 | 7 Apr 2020 |
| Utility: Flow assisted dynamic seal for high-convection, continuous-rotation plating Filling date: 6 Sep 2025 Issue date: 7 Apr 2020 | 24 Jul 2018 | 7 Apr 2020 |
| Utility: System implementing machine learning in complex multivariate wafer processing equipment Filling date: 6 Sep 2025 Issue date: 7 Apr 2020 | 30 Apr 2018 | 7 Apr 2020 |
| Utility: Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Filling date: 6 Sep 2025 Issue date: 31 Mar 2020 | 14 Dec 2016 | 31 Mar 2020 |
| Utility: Silicon-based deposition for semiconductor processing Filling date: 6 Sep 2025 Issue date: 24 Mar 2020 | 20 Apr 2017 | 24 Mar 2020 |
| Utility: Temperature control in RF chamber with heater and air amplifier Filling date: 6 Sep 2025 Issue date: 24 Mar 2020 | 19 Dec 2016 | 24 Mar 2020 |
| Utility: Mass flow controller for substrate processing Filling date: 6 Sep 2025 Issue date: 17 Mar 2020 | 9 Mar 2018 | 17 Mar 2020 |
| Utility: Multi-radiofrequency impedance control for plasma uniformity tuning Filling date: 6 Sep 2025 Issue date: 17 Mar 2020 | 29 Jan 2018 | 17 Mar 2020 |
| Utility: Systems and methods for controlling substrate approach toward a target horizontal plane Filling date: 6 Sep 2025 Issue date: 17 Mar 2020 | 17 Mar 2017 | 17 Mar 2020 |
| Utility: Apparatus for thermal control of tubing assembly and associated methods Filling date: 6 Sep 2025 Issue date: 17 Mar 2020 | 13 Jul 2016 | 17 Mar 2020 |
| Utility: Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework Filling date: 6 Sep 2025 Issue date: 10 Mar 2020 | 18 Dec 2018 | 10 Mar 2020 |
| Utility: Inductive current sensor on printed circuit board Filling date: 6 Sep 2025 Issue date: 10 Mar 2020 | 30 Jan 2017 | 10 Mar 2020 |
| Utility: Multi-level pulsing of DC and RF signals Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 1 May 2019 | 3 Mar 2020 |
| Utility: Feature fill with multi-stage nucleation inhibition Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 13 Nov 2018 | 3 Mar 2020 |
| Utility: Feature fill with nucleation inhibition Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 29 May 2018 | 3 Mar 2020 |
| Utility: Staircase encapsulation in 3D NAND fabrication Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 7 May 2018 | 3 Mar 2020 |
| Utility: Differentially pumped reactive gas injector Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 25 Oct 2017 | 3 Mar 2020 |
| Utility: Single ALD cycle thickness control in multi-station substrate deposition systems Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 13 Sep 2017 | 3 Mar 2020 |
| Utility: Tandem source activation for CVD of films Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 | 3 Aug 2017 | 3 Mar 2020 |
| Utility: Multi-level parameter and frequency pulsing with a low angular spread Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 13 Feb 2019 | 25 Feb 2020 |
| Utility: Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 30 Oct 2018 | 25 Feb 2020 |
| Utility: Method of etch model calibration using optical scatterometry Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 6 Apr 2018 | 25 Feb 2020 |
| Utility: Method for preventing line bending during metal fill process Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 9 Aug 2017 | 25 Feb 2020 |
| Utility: Pad raising mechanism in wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 | 1 Dec 2016 | 25 Feb 2020 |
| Utility: Methods of encapsulation Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 | 2 Nov 2018 | 18 Feb 2020 |
