Applied Materials
Utility Patents
Last updated:
List of all Applied Materials patents 1,752 in total
Status | Patent |
---|---|
Grant | Utility: IN SITU FAILURE DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS Filling date: 6 Sep 2025 Issue date: 10 Jun 2021 |
Grant | Utility: Solid State Heater And Method Of Manufacture Filling date: 6 Sep 2025 Issue date: 10 Jun 2021 |
Grant | Utility: HIGH BORON-CONTENT HARD MASK MATERIALS Filling date: 6 Sep 2025 Issue date: 10 Jun 2021 |
Grant | Utility: Methods for Conformal Doping of Three Dimensional Structures Filling date: 6 Sep 2025 Issue date: 10 Jun 2021 |
Grant | Utility: Loadlock integrated bevel etcher system Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Method of growing doped group IV materials Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Methods and apparatus for waveguide metrology Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Methods and apparatus for absolute and relative depth measurements using camera focus distance Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: High lateral to vertical ratio etch process for device manufacturing Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Heat shield assembly for an epitaxy chamber Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Method of gas composition determination, adjustment, and usage Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Methods of protecting metallic components against corrosion using chromium-containing thin films Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Predicting arrival time of components based on historical receipt data Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: Bottom-up gap-fill by surface poisoning treatment Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 |
Grant | Utility: PRESSURE REGULATED FLOW CONTROLLER Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: Graphene Diffusion Barrier Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: Plasma Source For Rotating Susceptor Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: Method Of Forming Self-Aligned Via Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: Methods for In-Situ Chamber Monitoring Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT ION SOURCE AND RADICAL SOURCE Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: METHOD AND SYSTEM FOR IMPROVING THE OPERATION OF SEMICONDUCTOR PROCESSING Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: COPPER, INDIUM, GALLIUM, SELENIUM (CIGS) FILMS WITH IMPROVED QUANTUM EFFICIENCY Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE UNIFORMITY Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: CHAMBER DEPOSITION AND ETCH PROCESS Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL PLASMA UNIFORMITY Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 |
Grant | Utility: Extreme ultraviolet mask blank with multilayer absorber and method of manufacture Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Gate all-around device Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Methods and apparatus for hybrid feature metallization Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Methods and systems for applying run-to-run control and virtual metrology to reduce equipment recovery time Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Liner for processing chamber Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Virtual sensor for spatially resolved wafer temperature control Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Magnetron having enhanced target cooling configuration Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Multi zone spot heating in epi Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Graphite susceptor Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: System and method for residual voltage control of electrostatic chucking assemblies Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Etch processing system having reflective endpoint detection Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Semiconductor processing systems having multiple plasma configurations Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: APPARATUS AND METHOD FOR CONTROLLING ION BEAM USING ELECTOSTATIC FILTER Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: METHOD OF PRE ALIGNING CARRIER, WAFER AND CARRIER-WAFER COMBINATION FOR THROUGHPUT EFFICIENCY Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: Doping Control of Metal Nitride Films Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: ELECTROSTATIC PUCK ASSEMBLY WITH METAL BONDED BACKING PLATE Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: Processing Chamber With Multiple Plasma Units Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: Rhenium Complexes and Methods of Use Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: WAFER EDGE ASYMMETRY CORRECTION USING GROOVE IN POLISHING PAD Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: PACKAGE CORE ASSEMBLY AND FABRICATION METHODS Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: METHODS FOR DEPOSITING PROTECTIVE COATINGS ON TURBINE BLADES AND OTHER AEROSPACE COMPONENTS Filling date: 6 Sep 2025 Issue date: 27 May 2021 |
Showing 950 to 1000 of 1752 patents.