ASML Holding N.V.
Utility Patents
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Adjustment assembly and substrate exposure system comprising such an adjustment assembly Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Reflective optical element for a radiation beam Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Apparatus for and method of controlling coalescence of droplets in a droplet stream Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: EUV pellicles Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Process window optimizer Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Defect pattern grouping method and system Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Fluid handling structure and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Multi-beam inspection apparatus Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Current measurement system Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Method for determining curvilinear patterns for patterning device Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Apparatus for transferring a substrate in a lithography system Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Pellicle and pellicle assembly Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Cooling apparatus and plasma-cleaning station for cooling apparatus Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Pick-and-place tool having multiple pick up elements Filling date: 9 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Broadband radiation generation in hollow-core fibers Filling date: 9 Sep 2025 Issue date: 18 Jan 2022 |
Grant | Utility: Lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 18 Jan 2022 |
Grant | Utility: Methods and apparatus for use in a device manufacturing method Filling date: 9 Sep 2025 Issue date: 18 Jan 2022 |
Grant | Utility: High harmonic generation radiation source Filling date: 9 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: Level sensor and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: Multi-cell detector for charged particles Filling date: 9 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: Method and apparatus for design of a metrology target Filling date: 9 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: Substrate table, immersion lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 4 Jan 2022 |
Grant | Utility: Systems and methods of optimal metrology guidance Filling date: 9 Sep 2025 Issue date: 4 Jan 2022 |
Grant | Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 4 Jan 2022 |
Grant | Utility: EUV optical element having blister-resistant multilayer cap Filling date: 9 Sep 2025 Issue date: 4 Jan 2022 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Filling date: 9 Sep 2025 Issue date: 21 Dec 2021 |
Grant | Utility: Particle suppression systems and methods Filling date: 9 Sep 2025 Issue date: 21 Dec 2021 |
Grant | Utility: Method of matching records, method of scheduling maintenance and apparatus Filling date: 9 Sep 2025 Issue date: 21 Dec 2021 |
Grant | Utility: Electron emitter and method of fabricating same Filling date: 9 Sep 2025 Issue date: 14 Dec 2021 |
Grant | Utility: Lithographic process and apparatus and inspection process and apparatus Filling date: 9 Sep 2025 Issue date: 14 Dec 2021 |
Grant | Utility: Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 14 Dec 2021 |
Grant | Utility: Method for controlling a manufacturing process and associated apparatuses Filling date: 9 Sep 2025 Issue date: 30 Nov 2021 |
Grant | Utility: Substrate holder, substrate support and method of clamping a substrate to a clamping system Filling date: 9 Sep 2025 Issue date: 30 Nov 2021 |
Grant | Utility: Metrology using a plurality of metrology target measurement recipes Filling date: 9 Sep 2025 Issue date: 30 Nov 2021 |
Grant | Utility: Lithographic apparatus and a method of operating the apparatus Filling date: 9 Sep 2025 Issue date: 30 Nov 2021 |
Grant | Utility: Method of determining a value of a parameter of interest of a patterning process, device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Substrate processing apparatus Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Optical system with compensation lens Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Method for determining deformation Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Metrology sensor, lithographic apparatus and method for manufacturing devices Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Methods of guiding process models and inspection in a manufacturing process Filling date: 9 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Apparatus and method for detecting time-dependent defects in a fast-charging device Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 |
Grant | Utility: Alignment sensor apparatus for process sensitivity compensation Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 |
Grant | Utility: Low dose charged particle metrology system Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 |
Grant | Utility: Particle traps and barriers for particle suppression Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 |
Grant | Utility: Method of unloading an object from a support table Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 |
Grant | Utility: Method and system for pattern configuration Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 |
Showing 150 to 200 of 666 patents.