Entegris
Utility Patents
Last updated:
List of all Entegris patents 135 in total
| Status | Patent |
|---|---|
Grant | Utility: Cleaning compositions for removing post etch residue Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: High torque polymer fittings Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 |
Grant | Utility: Substrate container with enhanced containment Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Post chemical mechanical polishing formulations and method of use Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Refillable ampoule with purge capability Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Disposable liquid chemical sensor system Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Microporous polyamide-imide membranes Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: High-purity tungsten hexacarbonyl for solid source delivery Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Smart package Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Apparatus and method for pressure dispensing of high viscosity liquid-containing materials Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Fluid delivery system and method Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Carbon materials for carbon implantation Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Ion implantation processes and apparatus Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Packaging for dip tubes Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Electrostatic chuck and method of making same Filling date: 6 Sep 2025 Issue date: 3 Dec 2019 |
Grant | Utility: Apparatus and methods for filling and dispensing liquids Filling date: 6 Sep 2025 Issue date: 26 Nov 2019 |
Grant | Utility: CMP pad conditioning assembly Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 |
Grant | Utility: Wafer support column with interlocking features Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 |
Grant | Utility: Formulations to selectively etch silicon and germanium Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 |
Grant | Utility: Compositions and methods for selectively etching titanium nitride Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 |
Grant | Utility: In-situ oxidized NiO as electrode surface for high k MIM device Filling date: 6 Sep 2025 Issue date: 12 Nov 2019 |
Grant | Utility: Method and apparatus to help promote contact of gas with vaporized material Filling date: 6 Sep 2025 Issue date: 5 Nov 2019 |
Grant | Utility: Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility Filling date: 6 Sep 2025 Issue date: 29 Oct 2019 |
Grant | Utility: Low temperature molybdenum film deposition utilizing boron nucleation layers Filling date: 6 Sep 2025 Issue date: 22 Oct 2019 |
Grant | Utility: Multi-pass gas cell with mirrors in openings of cylindrical wall for IR and UV monitoring Filling date: 6 Sep 2025 Issue date: 22 Oct 2019 |
Grant | Utility: Formulations for the removal of particles generated by cerium-containing solutions Filling date: 6 Sep 2025 Issue date: 15 Oct 2019 |
Grant | Utility: Connection verification tool Filling date: 6 Sep 2025 Issue date: 15 Oct 2019 |
Grant | Utility: Compositions and methods for selectively etching titanium nitride Filling date: 6 Sep 2025 Issue date: 1 Oct 2019 |
Grant | Utility: Compositions and methods for selectively etching titanium nitride Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 |
Grant | Utility: Electrostatic chuck Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 |
Grant | Utility: Solid vaporizer Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 |
Grant | Utility: Wafer shipper with purge capability Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 |
Grant | Utility: Diffusion resistant electrostatic clamp Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 |
Grant | Utility: Source reagent-based delivery of fluid with high material flux for batch deposition Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 |
Grant | Utility: Index of refraction sensor system with dual mode temperature control Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 |
Showing 100 to 135 of 135 patents.