Entegris
Utility Patent Applications

Last updated:

List of all Entegris patents 188 in total

Status Patent
Application
Utility: SOLIDS VAPORIZER External link
Filling date: 6 Sep 2025 Issue date: 1 Sep 2022
Application
Utility: CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND REDUCING GAS External link
Filling date: 6 Sep 2025 Issue date: 25 Aug 2022
Application
Utility: GROUP VI PRECURSOR COMPOUNDS External link
Filling date: 6 Sep 2025 Issue date: 18 Aug 2022
Application
Utility: PROCESS FOR PREPARING ORGANOTIN COMPOUNDS External link
Filling date: 6 Sep 2025 Issue date: 4 Aug 2022
Application
Utility: PROCESS FOR PREPARING ORGANOTIN COMPOUNDS External link
Filling date: 6 Sep 2025 Issue date: 4 Aug 2022
Application
Utility: 3-DIMENSIONAL NAND MEMORY WITH REDUCED THERMAL BUDGET External link
Filling date: 6 Sep 2025 Issue date: 4 Aug 2022
Application
Utility: METAL-ORGANIC-FRAMEWORK-CONTAINING BODIES AND RELATED METHODS External link
Filling date: 6 Sep 2025 Issue date: 28 Jul 2022
Application
Utility: HIGH THROUGHPUT DEPOSITION PROCESS External link
Filling date: 6 Sep 2025 Issue date: 28 Jul 2022
Application
Utility: HANDLE FOR WAFER CARRIER External link
Filling date: 6 Sep 2025 Issue date: 21 Jul 2022
Application
Utility: ELECTROSTATIC DISCHARGE MITIGATION TUBING External link
Filling date: 6 Sep 2025 Issue date: 14 Jul 2022
Application
Utility: WELDED CHECK VALVE External link
Filling date: 6 Sep 2025 Issue date: 7 Jul 2022
Application
Utility: AUTOMATABLE CLOSURE External link
Filling date: 6 Sep 2025 Issue date: 30 Jun 2022
Application
Utility: REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINER External link
Filling date: 6 Sep 2025 Issue date: 30 Jun 2022
Application
Utility: ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED METHODS AND STRUCTURES External link
Filling date: 6 Sep 2025 Issue date: 30 Jun 2022
Application
Utility: GAS STORAGE SYSTEMS AND METHOD THEREOF External link
Filling date: 6 Sep 2025 Issue date: 23 Jun 2022
Application
Utility: GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATION SYSTEM External link
Filling date: 6 Sep 2025 Issue date: 16 Jun 2022
Application
Utility: MEMBRANES FOR ACID-SENSITIVE SOLVENTS External link
Filling date: 6 Sep 2025 Issue date: 16 Jun 2022
Application
Utility: MULTI-LAYER COMPOSITES WITH VARIED LAYER THICKNESSES AND RELATED METHODS External link
Filling date: 6 Sep 2025 Issue date: 16 Jun 2022
Application
Utility: SPIRALING POLYPHASE ELECTRODES FOR ELECTROSTATIC CHUCK External link
Filling date: 6 Sep 2025 Issue date: 16 Jun 2022
Application
Utility: POROUS POLYETHYLENE FILTER MEMBRANE, AND RELATED FILTERS AND METHODS External link
Filling date: 6 Sep 2025 Issue date: 2 Jun 2022
Application
Utility: PHASE-SHIFT RETICLE FOR USE IN PHOTOLITHOGRAPHY External link
Filling date: 6 Sep 2025 Issue date: 26 May 2022
Application
Utility: FILTER APPARATUS WITH VENTED CORE, ELECTROSTATIC DISCHARGE MITIGATION, OR BOTH External link
Filling date: 6 Sep 2025 Issue date: 26 May 2022
Application
Utility: FILTER APPARATUS WITH VENTED CORE External link
Filling date: 6 Sep 2025 Issue date: 26 May 2022
Application
Utility: ARTICLES COATED WITH CRACK-RESISTANT FLUORO-ANNEALED FILMS AND METHODS OF MAKING External link
Filling date: 6 Sep 2025 Issue date: 19 May 2022
Application
Utility: MODIFIED CARBON ADSORBENTS External link
Filling date: 6 Sep 2025 Issue date: 19 May 2022
Application
Utility: COATED POROUS POLYMERIC MEMBRANES External link
Filling date: 6 Sep 2025 Issue date: 5 May 2022
Application
Utility: LOW METAL CONTENT POLYOLEFIN FILTER MEMBRANE External link
Filling date: 6 Sep 2025 Issue date: 5 May 2022
Application
Utility: SELECTIVE ALKYLATION OF CYCLOPENTADIENE External link
Filling date: 6 Sep 2025 Issue date: 28 Apr 2022
Application
Utility: ADSORBENT-TYPE STORAGE AND DELIVERY VESSELS WITH HIGH PURITY DELIVERY OF GAS, AND RELATED METHODS External link
Filling date: 6 Sep 2025 Issue date: 28 Apr 2022
Application
Utility: METHOD FOR PREPARING IODOSILANES External link
Filling date: 6 Sep 2025 Issue date: 28 Apr 2022
Application
Utility: Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adsorbent External link
Filling date: 6 Sep 2025 Issue date: 14 Apr 2022
Application
Utility: Filtration Membranes, Systems, and Methods for Producing Purified Water External link
Filling date: 6 Sep 2025 Issue date: 14 Apr 2022
Application
Utility: Post CMP Cleaning Compositions External link
Filling date: 6 Sep 2025 Issue date: 7 Apr 2022
Application
Utility: Microelectronic Device Cleaning Composition External link
Filling date: 6 Sep 2025 Issue date: 7 Apr 2022
Application
Utility: Membranes for Removing Metallic Species from Amines External link
Filling date: 6 Sep 2025 Issue date: 7 Apr 2022
Application
Utility: Self-Locking Manifold and Filter External link
Filling date: 6 Sep 2025 Issue date: 31 Mar 2022
Application
Utility: Etchant Compositions External link
Filling date: 6 Sep 2025 Issue date: 24 Mar 2022
Application
Utility: ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CARBON AND DEPOSITED SILICON-BASED MATERIAL, AND RELATED METHODS External link
Filling date: 6 Sep 2025 Issue date: 3 Mar 2022
Application
Utility: MAIN SEAL ASSEMBLY External link
Filling date: 6 Sep 2025 Issue date: 24 Feb 2022
Application
Utility: NITRIDE ETCHANT COMPOSITION AND METHOD External link
Filling date: 6 Sep 2025 Issue date: 17 Feb 2022
Application
Utility: FLUORINATED COMPOSITIONS FOR ION SOURCE PERFORMANCE IMPROVEMENTS IN NITROGEN ION IMPLANTATION External link
Filling date: 6 Sep 2025 Issue date: 10 Feb 2022
Application
Utility: GRAFTED POLYSULFONE MEMBRANES External link
Filling date: 6 Sep 2025 Issue date: 3 Feb 2022
Application
Utility: METHOD FOR REMOVING HARD MASKS External link
Filling date: 6 Sep 2025 Issue date: 3 Feb 2022
Application
Utility: COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS External link
Filling date: 6 Sep 2025 Issue date: 3 Feb 2022
Application
Utility: CARBON-FREE LAMINATED HAFNIUM OXIDE/ZIRCONIUM OXIDE FILMS FOR FERROELECTRIC MEMORIES External link
Filling date: 6 Sep 2025 Issue date: 20 Jan 2022
Application
Utility: KIT FOR INSTALLING IMPELLER INTO PROCESS VESSEL External link
Filling date: 6 Sep 2025 Issue date: 20 Jan 2022
Application
Utility: GROUP VI PRECURSOR COMPOUNDS External link
Filling date: 6 Sep 2025 Issue date: 13 Jan 2022
Application
Utility: CONNECTION ASSEMBLY AND FILTER ASSEMBLY External link
Filling date: 6 Sep 2025 Issue date: 13 Jan 2022
Application
Utility: PROCESS FOR PREPARING ORGANOTIN COMPOUNDS External link
Filling date: 6 Sep 2025 Issue date: 6 Jan 2022
Application
Utility: Ion Implantation System with Mixture of Arc Chamber Materials External link
Filling date: 6 Sep 2025 Issue date: 23 Dec 2021

Showing 1 to 50 of 188 patents.