Entegris
Utility Patents
Last updated:
List of all Entegris patents 135 in total
| Status | Patent |
|---|---|
Grant | Utility: Method for selectively removing nickel platinum material Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: High pressure filter Filling date: 6 Sep 2025 Issue date: 6 Sep 2022 |
Grant | Utility: Formulations for high selective silicon nitride etch Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Chemical delivery system and method of operating the chemical delivery system Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Grant | Utility: Spiraling polyphase electrodes for electrostatic chuck Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Method for forming carbon rich silicon-containing films Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Polyamide coated filter membrane, filters, and methods Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Substrate container with latching mechanism having two cam profiles Filling date: 6 Sep 2025 Issue date: 26 Jul 2022 |
Grant | Utility: Chemical resistant multi-layer coatings applied by atomic layer deposition Filling date: 6 Sep 2025 Issue date: 19 Jul 2022 |
Grant | Utility: Fluid circuit with integrated electrostatic discharge mitigation Filling date: 6 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Selective deposition of silicon nitride Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Chemical vapor deposition processes using ruthenium precursor and reducing gas Filling date: 6 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Wet etching composition and method Filling date: 6 Sep 2025 Issue date: 21 Jun 2022 |
Grant | Utility: Process for preparing organotin compounds Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 |
Grant | Utility: Group VI precursor compounds Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Ruthenium etching composition and method Filling date: 6 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Automatable closure Filling date: 6 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Fluid circuit with integrated electrostatic discharge mitigation Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: Nozzle filter Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: Adsorbent-based, mechanically-regulated gas storage and delivery vessel Filling date: 6 Sep 2025 Issue date: 17 May 2022 |
Grant | Utility: Aminoiodosilanes and methods of synthesizing these aminoiodosilanes Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Fluorine ion implantation method and system Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Welded check valve Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Grounding mechanism for multi-layer for electrostatic chuck, and related methods Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Automatable closure Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Germanium tetraflouride and hydrogen mixtures for an ion implantation system Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Coated porous polymeric membranes Filling date: 6 Sep 2025 Issue date: 29 Mar 2022 |
Grant | Utility: Valve and valve member for controlling fluid flow Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Sintered porous material having nodes and fibers of different materials, with different sintering points, and related methods of preparation and use Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Grafted polysulfone membranes Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Active wet scrubbing filtration system Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Latching mechanism for a substrate container Filling date: 6 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: Preparation of triiodosilanes Filling date: 6 Sep 2025 Issue date: 21 Dec 2021 |
Grant | Utility: Compositions and methods for removing ceria particles from a surface Filling date: 6 Sep 2025 Issue date: 2 Nov 2021 |
Grant | Utility: Gas filter Filling date: 6 Sep 2025 Issue date: 26 Oct 2021 |
Grant | Utility: Cleaning composition with corrosion inhibitor Filling date: 6 Sep 2025 Issue date: 19 Oct 2021 |
Grant | Utility: Selectively etching materials Filling date: 6 Sep 2025 Issue date: 19 Oct 2021 |
Grant | Utility: Valve system with position indicator Filling date: 6 Sep 2025 Issue date: 12 Oct 2021 |
Grant | Utility: Ion implantation system with mixture of arc chamber materials Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 |
Grant | Utility: Tamper-resistant chemical reagent package Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 |
Grant | Utility: Ceria removal compositions Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Post chemical mechanical polishing cleaning compositions Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Post CMP cleaning composition Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Fluidized granular absorbent bed filter Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Non-amine post-CMP compositions and method of use Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Silicon carbide/graphite composite and articles and assemblies comprising same Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 |
Grant | Utility: Modular tray ampoule Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: CVD Mo deposition by using MoOCl.sub.4 Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Hydrophobic polyethylene membrane for use in venting, degassing, and membrane distillation processes Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Post CMP cleaning compositions for ceria particles Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Showing 1 to 50 of 135 patents.