KLA
Utility Patents
Last updated:
List of all KLA patents 8 in total
| Status | Patent |
|---|---|
Grant | Utility: Automatic recipe optimization for overlay metrology system Filling date: 6 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: Adaptive focusing system for a scanning metrology tool Filling date: 6 Sep 2025 Issue date: 17 May 2022 |
Grant | Utility: Method and system for manufacturing integrated circuit Filling date: 6 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: Full beam metrology for x-ray scatterometry systems Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the same Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Overlay metrology on bonded wafers Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Design-assisted inspection for DRAM and 3D NAND devices Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Delivery of light into a vacuum chamber using an optical fiber Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Showing 1 to 8 of 8 patents.