MKS Instruments
Utility Patent Applications
Last updated:
List of all MKS Instruments patents 60 in total
| Status | Patent |
|---|---|
Application | Utility: Method and Apparatus for Partial Pressure Detection Filling date: 9 Sep 2025 Issue date: 14 Nov 2019 |
Application | Utility: Methods and Apparatus for Multiple Channel Mass Flow and Ratio Control Systems Filling date: 9 Sep 2025 Issue date: 7 Nov 2019 |
Application | Utility: Feedback Control By RF Waveform Tailoring For Ion Energy Distribution Filling date: 9 Sep 2025 Issue date: 31 Oct 2019 |
Application | Utility: PIECEWISE RF POWER SYSTEMS AND METHODS FOR SUPPLYING PRE-DISTORTED RF BIAS VOLTAGE SIGNALS TO AN ELECTRODE IN A PROCESSING CHAMBER Filling date: 9 Sep 2025 Issue date: 31 Oct 2019 |
Application | Utility: Method for Ion Mass Separation and Ion Energy Control in Process Plasmas Filling date: 9 Sep 2025 Issue date: 17 Oct 2019 |
Application | Utility: Apparatus and Method for Controlling Ion Energy Distribution in Process Plasmas Filling date: 9 Sep 2025 Issue date: 17 Oct 2019 |
Application | Utility: Thermal Conductivity Gauge Filling date: 9 Sep 2025 Issue date: 17 Oct 2019 |
Application | Utility: Polymer Composite Vacuum Components Filling date: 9 Sep 2025 Issue date: 5 Sep 2019 |
Application | Utility: ACTIVELY COOLED VACUUM ISOLATION VALVE Filling date: 9 Sep 2025 Issue date: 5 Sep 2019 |
Application | Utility: Method And Apparatus For Pulse Gas Delivery With Isolation Valves Filling date: 9 Sep 2025 Issue date: 8 Aug 2019 |
Showing 50 to 60 of 60 patents.