KLA
Utility Patents
Last updated:
List of all KLA patents 126 in total
| Status | Patent |
|---|---|
Grant | Utility: Grey-mode scanning scatterometry overlay metrology Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Pupil-plane beam scanning for metrology Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: System, method, and target for wafer alignment Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 |
Grant | Utility: Method and apparatus for beam stabilization and reference correction for EUV inspection Filling date: 6 Sep 2025 Issue date: 5 Apr 2022 |
Grant | Utility: Advanced in-line part average testing Filling date: 6 Sep 2025 Issue date: 5 Apr 2022 |
Grant | Utility: Method of measuring misregistration in the manufacture of topographic semiconductor device wafers Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: Reference image generation for semiconductor applications Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 |
Grant | Utility: Laser produced plasma illuminator with low atomic number cryogenic target Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: Variable aperture mask Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 |
Grant | Utility: System and method for protecting optics from vacuum ultraviolet light Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Laser produced plasma illuminator with liquid sheet jet target Filling date: 6 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Strontium tetraborate as optical glass material Filling date: 6 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Characterization system and method with guided defect discovery Filling date: 6 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Imaging overlay targets using Moire elements and rotational symmetry arrangements Filling date: 6 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Per-site residuals analysis for accurate metrology measurements Filling date: 6 Sep 2025 Issue date: 15 Feb 2022 |
Grant | Utility: Sensitive particle detection with spatially-varying polarization rotator and polarizer Filling date: 6 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Sample positioning system and method Filling date: 6 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Frequency conversion using stacked strontium tetraborate plates Filling date: 6 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Arrayed column detector Filling date: 6 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Multi-environment polarized infrared reflectometer for semiconductor metrology Filling date: 6 Sep 2025 Issue date: 25 Jan 2022 |
Grant | Utility: Determining metrology-like information for a specimen using an inspection tool Filling date: 6 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control Filling date: 6 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: Plasmonic photocathode emitters Filling date: 6 Sep 2025 Issue date: 4 Jan 2022 |
Grant | Utility: Performance optimized scanning sequence for eBeam metrology and inspection Filling date: 6 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: Six degree of freedom workpiece stage Filling date: 6 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: System and method for semiconductor device print check alignment Filling date: 6 Sep 2025 Issue date: 14 Dec 2021 |
Grant | Utility: Systems and methods for advanced defect ablation protection Filling date: 6 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Periodic semiconductor device misregistration metrology system and method Filling date: 6 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Image noise reduction using stacked denoising auto-encoder Filling date: 6 Sep 2025 Issue date: 9 Nov 2021 |
Grant | Utility: Misregistration metrology by using fringe Moire and optical Moire effects Filling date: 6 Sep 2025 Issue date: 2 Nov 2021 |
Grant | Utility: Vacuum actuator containment for molecular contaminant and particle mitigation Filling date: 6 Sep 2025 Issue date: 26 Oct 2021 |
Grant | Utility: Process monitoring of deep structures with X-ray scatterometry Filling date: 6 Sep 2025 Issue date: 12 Oct 2021 |
Grant | Utility: Soft x-ray optics with improved filtering Filling date: 6 Sep 2025 Issue date: 12 Oct 2021 |
Grant | Utility: Mid-infrared spectroscopy for measurement of high aspect ratio structures Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 |
Grant | Utility: System and method for defining flexible regions on a sample during inspection Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: System and method for reducing printable defects on extreme ultraviolet pattern masks Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 |
Grant | Utility: Unsupervised learning-based reference selection for enhanced defect inspection sensitivity Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 |
Grant | Utility: Methods and systems for measurement of thick films and high aspect ratio structures Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 |
Grant | Utility: System and method for pumping laser sustained plasma with interlaced pulsed illumination sources Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 |
Grant | Utility: Defect candidate generation for inspection Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Pattern-to-design alignment for one-dimensional unique structures Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Back-illuminated sensor and a method of manufacturing a sensor Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Apparatus, method and computer program product for defect detection in work pieces Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Visualization of three-dimensional semiconductor structures Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Parameter-stable misregistration measurement amelioration in semiconductor devices Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Inspection sensitivity improvements for optical and electron beam inspection Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Deep learning networks for nuisance filtering Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Metrology target for scanning metrology Filling date: 6 Sep 2025 Issue date: 27 Jul 2021 |
Grant | Utility: Multi-dimensional model of optical dispersion Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Scatterometry based methods and systems for measurement of strain in semiconductor structures Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 |
Showing 50 to 100 of 126 patents.