| Utility: System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources Filling date: 7 Sep 2025 Issue date: 27 Aug 2020 | 14 Feb 2020 | 27 Aug 2020 |
| Utility: PLASMONIC PHOTOCATHODE EMITTERS AT ULTRAVIOLET AND VISIBLE WAVELENGTHS Filling date: 7 Sep 2025 Issue date: 20 Aug 2020 | 13 Feb 2020 | 20 Aug 2020 |
| Utility: DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER Filling date: 7 Sep 2025 Issue date: 20 Aug 2020 | 22 Nov 2019 | 20 Aug 2020 |
| Utility: DESIGN FILE SELECTION FOR TEST IMAGE TO DESIGN ALIGNMENT Filling date: 7 Sep 2025 Issue date: 20 Aug 2020 | 7 Nov 2019 | 20 Aug 2020 |
| Utility: Sensitive Particle Detection with Spatially-Varying Polarization Rotator and Polarizer Filling date: 7 Sep 2025 Issue date: 20 Aug 2020 | 20 Sep 2019 | 20 Aug 2020 |
| Utility: System and Method for Inspection Using Tensor Decomposition and Singular Value Decomposition Filling date: 7 Sep 2025 Issue date: 30 Jul 2020 | 16 Jan 2020 | 30 Jul 2020 |
| Utility: Scaling Metric for Quantifying Metrology Sensitivity to Process Variation Filling date: 7 Sep 2025 Issue date: 30 Jul 2020 | 13 Jan 2020 | 30 Jul 2020 |
| Utility: Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Structures Filling date: 7 Sep 2025 Issue date: 30 Jul 2020 | 13 Jan 2020 | 30 Jul 2020 |
| Utility: Methods And Systems For Inspection Of Semiconductor Structures With Automatically Generated Defect Features Filling date: 7 Sep 2025 Issue date: 23 Jul 2020 | 16 Jan 2020 | 23 Jul 2020 |
| Utility: Image Noise Reduction Using Stacked Denoising Auto-Encoder Filling date: 7 Sep 2025 Issue date: 16 Jul 2020 | 6 Jan 2020 | 16 Jul 2020 |
| Utility: Field-to-Field Corrections Using Overlay Targets Filling date: 7 Sep 2025 Issue date: 25 Jun 2020 | 8 Nov 2019 | 25 Jun 2020 |
| Utility: Care Area Based Swath Speed for Throughput and Sensitivity Improvement Filling date: 7 Sep 2025 Issue date: 25 Jun 2020 | 31 Oct 2019 | 25 Jun 2020 |
| Utility: Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures Filling date: 7 Sep 2025 Issue date: 25 Jun 2020 | 22 Oct 2019 | 25 Jun 2020 |
| Utility: Joint Electron-Optical Columns for Flood-Charging and Image-Forming in Voltage Contrast Wafer Inspections Filling date: 7 Sep 2025 Issue date: 18 Jun 2020 | 27 Nov 2019 | 18 Jun 2020 |
| Utility: Detection and Correction of System Responses in Real-Time Filling date: 7 Sep 2025 Issue date: 18 Jun 2020 | 22 Nov 2019 | 18 Jun 2020 |
| Utility: BACK-ILLUMINATED SENSOR AND A METHOD OF MANUFACTURING A SENSOR Filling date: 7 Sep 2025 Issue date: 18 Jun 2020 | 5 Sep 2019 | 18 Jun 2020 |
| Utility: INSPECTION SENSITIVITY IMPROVEMENTS FOR OPTICAL AND ELECTRON BEAM INSPECTION Filling date: 7 Sep 2025 Issue date: 11 Jun 2020 | 22 Jul 2019 | 11 Jun 2020 |
| Utility: Soft Gripper With Multizone Control to Allow Individual Joint Articulation Filling date: 7 Sep 2025 Issue date: 21 May 2020 | 13 Nov 2019 | 21 May 2020 |
| Utility: Radial Polarizer for Particle Detection Filling date: 7 Sep 2025 Issue date: 14 May 2020 | 20 Sep 2019 | 14 May 2020 |
| Utility: System and Method for Determining Type and Size of Defects on Blank Reticles Filling date: 7 Sep 2025 Issue date: 7 May 2020 | 17 Sep 2019 | 7 May 2020 |
| Utility: Shape-Distortion Standards for Calibrating Measurement Tools for Nominally Flat Objects Filling date: 7 Sep 2025 Issue date: 30 Apr 2020 | 25 Oct 2019 | 30 Apr 2020 |
| Utility: SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN Filling date: 7 Sep 2025 Issue date: 30 Apr 2020 | 26 Sep 2019 | 30 Apr 2020 |
| Utility: REMOVABLE OPAQUE COATING FOR ACCURATE OPTICAL TOPOGRAPHY MEASUREMENTS ON TOP SURFACES OF TRANSPARENT FILMS Filling date: 7 Sep 2025 Issue date: 23 Apr 2020 | 9 Oct 2019 | 23 Apr 2020 |
| Utility: Computationally Efficient X-ray Based Overlay Measurement Filling date: 7 Sep 2025 Issue date: 16 Apr 2020 | 17 Dec 2019 | 16 Apr 2020 |
| Utility: ELECTRON GUN AND ELECTRON MICROSCOPE Filling date: 7 Sep 2025 Issue date: 16 Apr 2020 | 11 Sep 2019 | 16 Apr 2020 |
| Utility: DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS Filling date: 7 Sep 2025 Issue date: 26 Mar 2020 | 6 Sep 2019 | 26 Mar 2020 |
| Utility: DETECTING DEFECTS IN A LOGIC REGION ON A WAFER Filling date: 7 Sep 2025 Issue date: 19 Mar 2020 | 18 Aug 2019 | 19 Mar 2020 |
| Utility: Process Temperature Measurement Device Fabrication Techniques and Methods of Calibration and Data Interpolation of the Same Filling date: 7 Sep 2025 Issue date: 12 Mar 2020 | 3 Sep 2019 | 12 Mar 2020 |
| Utility: Multi-Wavelength Interferometry for Defect Classification Filling date: 7 Sep 2025 Issue date: 5 Mar 2020 | 26 Aug 2019 | 5 Mar 2020 |
| Utility: LOW PROFILE WAFER MANIPULATOR Filling date: 7 Sep 2025 Issue date: 6 Feb 2020 | 6 Aug 2019 | 6 Feb 2020 |
| Utility: Apparatus and Method for Measuring Topography and Gradient of the Surfaces, Shape, and Thickness of Patterned and Unpatterned Wafers Filling date: 7 Sep 2025 Issue date: 30 Jan 2020 | 19 Jul 2019 | 30 Jan 2020 |
