| Utility: Ultra-low defect part process Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 12 Oct 2017 | 3 Sep 2019 |
| Utility: Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 27 Jun 2017 | 3 Sep 2019 |
| Utility: Active showerhead Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 9 Nov 2016 | 3 Sep 2019 |
| Utility: Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 11 Jul 2016 | 3 Sep 2019 |
| Utility: Tunable multi-zone gas injection system Filling date: 6 Sep 2025 Issue date: 3 Sep 2019 | 4 May 2015 | 3 Sep 2019 |
| Utility: Chamber with vertical support stem for symmetric conductance and RF delivery Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 18 Jul 2018 | 27 Aug 2019 |
| Utility: Pulsing RF power in etch process to enhance tungsten gapfill performance Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 1 May 2018 | 27 Aug 2019 |
| Utility: Systems and methods for achieving peak ion energy enhancement with a low angular spread Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 31 Aug 2017 | 27 Aug 2019 |
| Utility: Plasma ignition and sustaining apparatus Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 3 Nov 2015 | 27 Aug 2019 |
| Utility: Electrostatic chuck cleaning fixture Filling date: 6 Sep 2025 Issue date: 27 Aug 2019 | 12 Dec 2013 | 27 Aug 2019 |
| Utility: Inter-electrode gap variation methods for compensating deposition non-uniformity Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 2 Jan 2018 | 20 Aug 2019 |
| Utility: Universal multiprotocol industrial data logger Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 27 Sep 2017 | 20 Aug 2019 |
| Utility: Methods and apparatuses for etch profile matching by surface kinetic model optimization Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 17 Dec 2015 | 20 Aug 2019 |
| Utility: Apparatus for UV flowable dielectric Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 16 Nov 2015 | 20 Aug 2019 |
| Utility: Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values Filling date: 6 Sep 2025 Issue date: 20 Aug 2019 | 21 Sep 2015 | 20 Aug 2019 |
| Utility: Step ladder with component rack system for fabrication facility Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 12 Jul 2017 | 13 Aug 2019 |
| Utility: Control of etch rate using modeling, feedback and impedance match Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 20 Mar 2017 | 13 Aug 2019 |
| Utility: Auto-correction of electrostatic chuck temperature non-uniformity Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 21 Sep 2015 | 13 Aug 2019 |
| Utility: Low volume showerhead with faceplate holes for improved flow uniformity Filling date: 6 Sep 2025 Issue date: 13 Aug 2019 | 10 Sep 2015 | 13 Aug 2019 |
| Utility: Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 17 Jul 2018 | 6 Aug 2019 |
| Utility: Dry plasma etch method to pattern MRAM stack Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 28 Sep 2017 | 6 Aug 2019 |
| Utility: Apparatus and method for deposition and etch in gap fill Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 22 Aug 2017 | 6 Aug 2019 |
| Utility: Technique to deposit sidewall passivation for high aspect ratio cylinder etch Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 17 May 2016 | 6 Aug 2019 |
| Utility: Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 6 Apr 2016 | 6 Aug 2019 |
| Utility: Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber Filling date: 6 Sep 2025 Issue date: 6 Aug 2019 | 10 Dec 2015 | 6 Aug 2019 |
| Utility: Active feedback control of subsystems of a process module Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 | 20 Nov 2017 | 30 Jul 2019 |
| Utility: Dynamic modulation of cross flow manifold during elecroplating Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 | 1 Aug 2016 | 30 Jul 2019 |
| Utility: Gas distribution system for ceramic showerhead of plasma etch reactor Filling date: 6 Sep 2025 Issue date: 30 Jul 2019 | 25 Jan 2016 | 30 Jul 2019 |
