Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 402 in total
| Status | Patent |
|---|---|
Application | Utility: SELECTIVE DEPOSITION OF SILICON OXIDE Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: Systems and Methods for Controlling Substrate Approach Toward a Target Horizontal Plane Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: Apparatus for Thermal Control of Tubing Assembly and Associated Methods Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: SPLIT CHAMBER ASSEMBLY Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH TRANSFORMER COUPLED PLASMA Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE SUPPORT AT HIGH TEMPERATURES Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: METAL FILL PROCESS FOR THREE-DIMENSIONAL VERTICAL NAND WORDLINE Filling date: 8 Sep 2025 Issue date: 2 Jul 2020 |
Application | Utility: SUBSTRATE PROCESSING SYSTEM WITH TANDEM SOURCE ACTIVATION FOR CVD Filling date: 8 Sep 2025 Issue date: 25 Jun 2020 |
Application | Utility: DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGANIC MATERIALS Filling date: 8 Sep 2025 Issue date: 25 Jun 2020 |
Application | Utility: PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING Filling date: 8 Sep 2025 Issue date: 25 Jun 2020 |
Application | Utility: Separation of Plasma Suppression and Wafer Edge to Improve Edge Film Thickness Uniformity Filling date: 8 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS MULTIPLE PLASMA PROCESSING STATIONS Filling date: 8 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: VACUUM CHAMBER OPENING SYSTEM Filling date: 8 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: ETCHING CARBON LAYER USING DOPED CARBON AS A HARD MASK Filling date: 8 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: REAL-TIME HEALTH MONITORING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT Filling date: 8 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: FEATURE FILL WITH NUCLEATION INHIBITION Filling date: 8 Sep 2025 Issue date: 11 Jun 2020 |
Application | Utility: FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION Filling date: 8 Sep 2025 Issue date: 11 Jun 2020 |
Application | Utility: ACTUATOR TO ADJUST DYNAMICALLY SHOWERHEAD TILT IN A SEMICONDUCTOR- PROCESSING APPARATUS Filling date: 8 Sep 2025 Issue date: 11 Jun 2020 |
Application | Utility: ENDPOINT SENSOR BASED CONTROL INCLUDING ADJUSTMENT OF AN EDGE RING PARAMETER FOR EACH SUBSTRATE PROCESSED TO MAINTAIN ETCH RATE UNIFORMITY Filling date: 8 Sep 2025 Issue date: 11 Jun 2020 |
Application | Utility: MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD Filling date: 8 Sep 2025 Issue date: 4 Jun 2020 |
Application | Utility: MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 8 Sep 2025 Issue date: 4 Jun 2020 |
Application | Utility: PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 8 Sep 2025 Issue date: 4 Jun 2020 |
Application | Utility: ONE-PIECE ANODE FOR TUNING ELECTROPLATING AT AN EDGE OF A SUBSTRATE Filling date: 8 Sep 2025 Issue date: 4 Jun 2020 |
Application | Utility: DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT Filling date: 8 Sep 2025 Issue date: 4 Jun 2020 |
Application | Utility: MULTI-LEVEL PULSING OF DC AND RF SIGNALS Filling date: 8 Sep 2025 Issue date: 28 May 2020 |
Application | Utility: SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING Filling date: 8 Sep 2025 Issue date: 28 May 2020 |
Application | Utility: PERIPHERAL RF FEED AND SYMMETRIC RF RETURN FOR SYMMETRIC RF DELIVERY Filling date: 8 Sep 2025 Issue date: 21 May 2020 |
Application | Utility: INTEGRATING ATOMIC SCALE PROCESSES: ALD (ATOMIC LAYER DEPOSITION) AND ALE (ATOMIC LAYER ETCH) Filling date: 8 Sep 2025 Issue date: 21 May 2020 |
Application | Utility: METHODS OF ENCAPSULATION Filling date: 8 Sep 2025 Issue date: 14 May 2020 |
Application | Utility: ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL Filling date: 8 Sep 2025 Issue date: 14 May 2020 |
Application | Utility: MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHNIQUES AND USE CASES THEREFOR Filling date: 8 Sep 2025 Issue date: 7 May 2020 |
Application | Utility: METHOD FOR PREVENTING LINE BENDING DURING METAL FILL PROCESS Filling date: 8 Sep 2025 Issue date: 7 May 2020 |
Application | Utility: ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME Filling date: 8 Sep 2025 Issue date: 7 May 2020 |
Application | Utility: FLOW THROUGH LINE CHARGE VOLUME Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 |
Application | Utility: ANTIMONY CO-DOPING WITH PHOSPHORUS TO FORM ULTRASHALLOW JUNCTIONS USING ATOMIC LAYER DEPOSITION AND ANNEALING Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 |
Application | Utility: REDUCTION OF SIDEWALL NOTCHING FOR HIGH ASPECT RATIO 3D NAND ETCH Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 |
Application | Utility: DESIGNER ATOMIC LAYER ETCHING Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 |
Application | Utility: CONTROL OF WAFER BOW IN MULTIPLE STATIONS Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 |
Application | Utility: SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 |
Application | Utility: RF ANTENNA PRODUCING A UNIFORM NEAR-FIELD POYNTING VECTOR Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 |
Application | Utility: Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 |
Application | Utility: COOLING SYSTEM FOR RF POWER ELECTRONICS Filling date: 8 Sep 2025 Issue date: 9 Apr 2020 |
Application | Utility: DIRECT DRIVE RF CIRCUIT FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 8 Sep 2025 Issue date: 9 Apr 2020 |
Application | Utility: Systems and Methods for UV-Based Suppression of Plasma Instability Filling date: 8 Sep 2025 Issue date: 9 Apr 2020 |
Application | Utility: REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT Filling date: 8 Sep 2025 Issue date: 9 Apr 2020 |
Application | Utility: VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP Filling date: 8 Sep 2025 Issue date: 2 Apr 2020 |
Application | Utility: METHOD FOR SELECTIVE DEPOSITION USING A BASE-CATALYZED INHIBITOR Filling date: 8 Sep 2025 Issue date: 2 Apr 2020 |
Application | Utility: Ceramic Foam for Helium Light-Up Suppression Filling date: 8 Sep 2025 Issue date: 2 Apr 2020 |
Application | Utility: ASYMMETRIC WAFER BOW COMPENSATION BY PHYSICAL VAPOR DEPOSITION Filling date: 8 Sep 2025 Issue date: 2 Apr 2020 |
Showing 200 to 250 of 402 patents.