Lam Research
Utility Patents
Last updated:
List of all Lam Research patents 478 in total
| Status | Patent |
|---|---|
Grant | Utility: Atomic layer etching of tantalum Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Selective deposition of etch-stop layer for enhanced patterning Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Designer atomic layer etching Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Continuous and pulsed RF plasma for etching metals Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Equipment front end module gas recirculation Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Ultrathin atomic layer deposition film accuracy thickness control Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Methods of fault detection for multiplexed heater array Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Control of directionality in atomic layer etching Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Platform architecture to improve system productivity Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Selective deposition with atomic layer etch reset Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Monolithic gas distribution manifold and various construction techniques and use cases therefor Filling date: 6 Sep 2025 Issue date: 11 Feb 2020 |
Grant | Utility: Control of water bow in multiple stations Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Pulsed plasma chamber in dual chamber configuration Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Plasma excitation for spatial atomic layer deposition (ALD) reactors Filling date: 6 Sep 2025 Issue date: 4 Feb 2020 |
Grant | Utility: Forming low resistivity fluorine free tungsten film without nucleation Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Tin oxide films in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Method for generating vertical profiles in organic layer etches Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Method to recess cobalt for gate metal application Filling date: 6 Sep 2025 Issue date: 28 Jan 2020 |
Grant | Utility: Method for selectively etching with reduced aspect ratio dependence Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Self-assembled monolayers as an etchant in atomic layer etching Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Edge ring centering method using ring dynamic alignment data Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Systems and methods for tilting a wafer for achieving deposition uniformity Filling date: 6 Sep 2025 Issue date: 21 Jan 2020 |
Grant | Utility: Dual push between a host computer system and an RF generator Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Layout pattern proximity correction through edge placement error prediction Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Plasma light up suppression Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Method of sealing open pores on surface of porous dielectric material using iCVD process Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus Filling date: 6 Sep 2025 Issue date: 14 Jan 2020 |
Grant | Utility: Systems and methods for UV-based suppression of plasma instability Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Hardware and process for film uniformity improvement Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Tungsten for wordline applications Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Multi-cycle ALD process for film uniformity and thickness profile modulation Filling date: 6 Sep 2025 Issue date: 7 Jan 2020 |
Grant | Utility: Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing Filling date: 6 Sep 2025 Issue date: 31 Dec 2019 |
Grant | Utility: System and method for substrate support feed-forward temperature control based on RF power Filling date: 6 Sep 2025 Issue date: 31 Dec 2019 |
Grant | Utility: Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Method of achieving high selectivity for high aspect ratio dielectric etch Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Direct drive RF circuit for substrate processing systems Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Atomic layer deposition and etch in a single plasma chamber for fin field effect transistor formation Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Vacuum-integrated hardmask processes and apparatus Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Multi-station tool with wafer transfer microclimate systems Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Flow through line charge volume Filling date: 6 Sep 2025 Issue date: 24 Dec 2019 |
Grant | Utility: Low resistivity films containing molybdenum Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Layer-by-layer deposition using hydrogen Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Dynamic coolant mixing manifold Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: TSV bath evaluation using field versus feature contrast Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Smart vibration wafer with optional integration with semiconductor processing tool Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Virtual metrology method for ESC temperature estimation using thermal control elements Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Systems and methods for controlling plasma instability in semiconductor fabrication Filling date: 6 Sep 2025 Issue date: 17 Dec 2019 |
Grant | Utility: Three or more states for achieving high aspect ratio dielectric etch Filling date: 6 Sep 2025 Issue date: 10 Dec 2019 |
Grant | Utility: Electrochemical doping of thin metal layers employing underpotential deposition and thermal treatment Filling date: 6 Sep 2025 Issue date: 10 Dec 2019 |
Showing 350 to 400 of 478 patents.