| Utility: PROFILE CONTROL DURING POLISHING OF A STACK OF ADJACENT CONDUCTIVE LAYERS Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 7 Jun 2021 | 9 Dec 2021 |
| Utility: COATED DRUG COMPOSITIONS AND METHODS OF PREPARING THE SAME Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 7 Jun 2021 | 9 Dec 2021 |
| Utility: FLUORINE-FREE TUNGSTEN ALD FOR DIELECTRIC SELECTIVITY IMPROVEMENT Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 4 Jun 2021 | 9 Dec 2021 |
| Utility: TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ONTO A SUBSTRATE Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 27 May 2021 | 9 Dec 2021 |
| Utility: VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A VACUUM CHAMBER Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 27 May 2021 | 9 Dec 2021 |
| Utility: VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A VACUUM CHAMBER Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 27 May 2021 | 9 Dec 2021 |
| Utility: GRADIENT ENCAPSULATION OF WAVEGUIDE GRATINGS Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 25 May 2021 | 9 Dec 2021 |
| Utility: Fluorine-Free Tungsten ALD And Tungsten Selective CVD For Dielectrics Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 8 Apr 2021 | 9 Dec 2021 |
| Utility: PLASMA CLEANING METHODS FOR PROCESSING CHAMBERS Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 9 Jun 2020 | 9 Dec 2021 |
| Utility: OXIDE LAYER COMPOSITIONS FOR TURBINE ENGINE COMPONENTS Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 9 Jun 2020 | 9 Dec 2021 |
| Utility: Additive Manufacturing of Polishing Pads Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 9 Jun 2020 | 9 Dec 2021 |
| Utility: Additive Manufacturing of Polishing Pads Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 9 Jun 2020 | 9 Dec 2021 |
| Utility: METHODS AND APPARATUS FOR SYMMETRICAL HOLLOW CATHODE ELECTRODE AND DISCHARGE MODE FOR REMOTE PLASMA PROCESSES Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 5 Jun 2020 | 9 Dec 2021 |
| Utility: System and Method of Measuring Refractive Index of EUV Mask Absorber Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 5 Jun 2020 | 9 Dec 2021 |
| Utility: System and Method to Measure Refractive Index at Specific Wavelengths Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 5 Jun 2020 | 9 Dec 2021 |
| Utility: APPARATUS AND METHODS FOR CONTROLLING CONCENTRATION OF PRECURSORS TO PROCESSING CHAMBER Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 5 Jun 2020 | 9 Dec 2021 |
| Utility: SUBSTRATE PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 3 Jun 2020 | 9 Dec 2021 |
| Utility: COMPENSATION FOR SUBSTRATE DOPING IN EDGE RECONSTRUCTION FOR IN-SITU ELECTROMAGNETIC INDUCTIVE MONITORING Filling date: 6 Sep 2025 Issue date: 9 Dec 2021 | 26 Sep 2018 | 9 Dec 2021 |
| Utility: Dual load lock chamber Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 20 Jul 2020 | 7 Dec 2021 |
| Utility: Bonding structure of e chuck to aluminum base configuration Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 18 May 2020 | 7 Dec 2021 |
| Utility: Extreme ultraviolet mask absorber and processes for manufacture Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 19 Dec 2019 | 7 Dec 2021 |
| Utility: Methods of forming devices on a substrate Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 6 Dec 2019 | 7 Dec 2021 |
| Utility: Apparatus and techniques for angled etching using multielectrode extraction source Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 13 Nov 2019 | 7 Dec 2021 |
| Utility: Method of fabricating a semiconductor device having reduced contact resistance Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 8 Nov 2019 | 7 Dec 2021 |
| Utility: System and method for electrostatically chucking a substrate to a carrier Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 16 Oct 2019 | 7 Dec 2021 |
| Utility: Transistor and method for forming a transistor Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 30 Sep 2019 | 7 Dec 2021 |
| Utility: Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 1 Jul 2019 | 7 Dec 2021 |
| Utility: Bit-ordered binary-weighted multiplier-accumulator Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 9 May 2019 | 7 Dec 2021 |
| Utility: Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 12 Apr 2019 | 7 Dec 2021 |
| Utility: Methods and systems for liquid particle prequalification Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 30 Jul 2018 | 7 Dec 2021 |
| Utility: Proximity contact cover ring for plasma dicing Filling date: 6 Sep 2025 Issue date: 7 Dec 2021 | 19 Sep 2014 | 7 Dec 2021 |
| Utility: Temperature Control For Insertable Target Holder For Solid Dopant Materials Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 16 Aug 2021 | 2 Dec 2021 |
| Utility: PLASMA PROCESSING APPARATUS AND TECHNIQUES Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 13 Aug 2021 | 2 Dec 2021 |
| Utility: THIN FILM TRANSISTOR WITH SMALL STORAGE CAPACITOR WITH METAL OXIDE SWITCH Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 21 Jul 2021 | 2 Dec 2021 |
| Utility: SELF-ASSEMBLED MONOLAYER DEPOSITION FROM LOW VAPOR PRESSURE ORGANIC MOLECULES Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 28 May 2021 | 2 Dec 2021 |
| Utility: VARIABLE LOOP CONTROL FEATURE Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 21 May 2021 | 2 Dec 2021 |
| Utility: METHODS OF MODIFYING PORTIONS OF LAYER STACKS Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 10 Mar 2021 | 2 Dec 2021 |
| Utility: METHODS OF MODIFYING PORTIONS OF LAYER STACKS Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 25 Jan 2021 | 2 Dec 2021 |
| Utility: METHODS AND SYSTEMS FOR MONITORING INPUT POWER FOR PROCESS CONTROL IN SEMICONDUCTOR PROCESS SYSTEMS Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 17 Dec 2020 | 2 Dec 2021 |
| Utility: DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 2 Jun 2020 | 2 Dec 2021 |
| Utility: DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 2 Jun 2020 | 2 Dec 2021 |
| Utility: HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI-ENVIRONMENTS Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 1 Jun 2020 | 2 Dec 2021 |
| Utility: METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 1 Jun 2020 | 2 Dec 2021 |
| Utility: ELECTRICAL CONNECTOR FOR COOLED SUBSTRATE SUPPORT ASSEMBLY Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 29 May 2020 | 2 Dec 2021 |
| Utility: METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 28 May 2020 | 2 Dec 2021 |
| Utility: METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 27 May 2020 | 2 Dec 2021 |
| Utility: PRECLEAN AND ENCAPSULTAION OF MICROLED FEATURES Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 26 May 2020 | 2 Dec 2021 |
| Utility: SUBSTRATE SUPPORT DESIGNS FOR A DEPOSITION CHAMBER Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 3 Jul 2019 | 2 Dec 2021 |
| Utility: AN ADVANCED CERAMIC LID WITH EMBEDDED HEATER ELEMENTS AND EMBEDDED RF COIL FOR HDP CVD AND INDUCTIVELY COUPLED PLASMA TREATMENT CHAMBERS Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 9 Apr 2019 | 2 Dec 2021 |
| Utility: METHOD FOR AUTOMATED CRITICAL DIMENSION MEASUREMENT ON A SUBSTRATE FOR DISPLAY MANUFACTURING, METHOD OF INSPECTING A LARGE AREA SUBSTRATE FOR DISPLAY MANUFACTURING, APPARATUS FOR INSPECTING A LARGE AREA SUBSTRATE FOR DISPLAY MANUFACTURING AND METHOD OF OPERATING THEREOF Filling date: 6 Sep 2025 Issue date: 2 Dec 2021 | 22 Feb 2018 | 2 Dec 2021 |
